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Dual-mass linear vibration silicon-based MEMS gyroscope

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Dual-mass linear vibration silicon-based MEMS gyroscopeby Huiliang Cao.
作者:	Cao, Huiliang.
出版者:	Singapore :Springer Nature Singapore :2023.
面頁冊數:	x, 224 p. :ill. (some col.), digital ;24 cm.
Contained By:	Springer Nature eBook
標題:	Gyroscopes.
電子資源:	https://doi.org/10.1007/978-981-19-9247-6
ISBN:	9789811992476$q(electronic bk.)

Dual-mass linear vibration silicon-based MEMS gyroscope
Cao, Huiliang.

Dual-mass linear vibration silicon-based MEMS gyroscope[electronic resource] /by Huiliang Cao. - Singapore :Springer Nature Singapore :2023. - x, 224 p. :ill. (some col.), digital ;24 cm.

Chapter 1 Introduction -- Chapter 2 Silicon-based MEMS gyroscope structure and working principle -- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model -- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization -- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology -- Chapter 6 Temperature influence on MEMS gyroscope and suppression method -- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology -- References.

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

ISBN: 9789811992476$q(electronic bk.)

Standard No.: 10.1007/978-981-19-9247-6doiSubjects--Topical Terms:

513807
Gyroscopes.

LC Class. No.: TJ209

Dewey Class. No.: 681.753

Dual-mass linear vibration silicon-based MEMS gyroscope
LDR:02251nmm a2200349 a 4500 001 643047
003 DE-He213
005 20230417201837.0
006 m d
007 cr nn 008maaau
008 231123s2023 si s 0 eng d
020 $a 9789811992476$q(electronic bk.)
020 $a 9789811992469$q(paper)
024 7 $a 10.1007/978-981-19-9247-6 $2 doi
035 $a 978-981-19-9247-6
040 $a GP $c GP
041 0 $a eng
050 4 $a TJ209
072 7 $a TRP $2 bicssc
072 7 $a TTDS $2 bicssc
072 7 $a TEC002000 $2 bisacsh
072 7 $a TRP $2 thema
072 7 $a TTDS $2 thema
082 0 4 $a 681.753 $2 23
090 $a TJ209 $b .C235 2023
100 1 $a Cao, Huiliang. $3 950561
245 1 0 $a Dual-mass linear vibration silicon-based MEMS gyroscope $h [electronic resource] / $c by Huiliang Cao.
260 $a Singapore : $b Springer Nature Singapore : $b Imprint: Springer, $c 2023.
300 $a x, 224 p. : $b ill. (some col.), digital ; $c 24 cm.
505 0 $a Chapter 1 Introduction -- Chapter 2 Silicon-based MEMS gyroscope structure and working principle -- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model -- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization -- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology -- Chapter 6 Temperature influence on MEMS gyroscope and suppression method -- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology -- References.
520 $a This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
650 0 $a Gyroscopes. $3 513807
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Silicon $x Industrial applications. $3 676874
650 1 4 $a Aerospace Technology and Astronautics. $3 309707
650 2 4 $a Control, Robotics, Automation. $3 914981
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer Nature eBook
856 4 0 $u https://doi.org/10.1007/978-981-19-9247-6
950 $a Engineering (SpringerNature-11647)