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MEMS Reference Shelf,

書目資訊

MEMS vibratory gyroscopes :structura...

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Acar, Cenk.

MEMS vibratory gyroscopes :structural approaches to improve robustness /

by: Acar, Cenk.

Silicon carbide microsystems for har...

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Azevedo, Robert G.

Silicon carbide microsystems for harsh environments

by: Azevedo, Robert G.

MEMS materials and processes handbook

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Ghodssi, Reza.

MEMS materials and processes handbook

by: Ghodssi, Reza.

MEMS reliability

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Hartzell, Allyson L.

MEMS reliability

by: Hartzell, Allyson L.

RF MEMS switches and integrated swit...

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Liu, Ai-Qun.

RF MEMS switches and integrated switching circuitsdesign, fabrication, and test /

by: Liu, Ai-Qun.

Radioisotope thin-film powered micro...

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Duggirala, Rajesh.

Radioisotope thin-film powered microsystems

by: Duggirala, Rajesh.

Multi-wafer rotating MEMS machinestu...

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Lang, Jeffrey H.

Multi-wafer rotating MEMS machinesturbines, generators, and engines /

by: Lang, Jeffrey H.

Photonic microsystemsmicro and nanot...

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Solgaard, Olav.

Photonic microsystemsmicro and nanotechnology applied to optical devices and systems /

by: Solgaard, Olav.

BioNanoFluidic MEMS /

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Hesketh, Peter J.

BioNanoFluidic MEMS /

by: Hesketh, Peter J.

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