Epitaxy.
Overview
| Works: | 8 works in 5 publications in 5 languages | |
|---|---|---|
Titles
Atomic layer depositionprinciples, characteristics, and nanotechnology applications /
by:
(Electronic resources)
Investigation on SiGe selective epitaxy for source and drain engineering in 22 nm CMOS technology node and beyond
by:
(Electronic resources)
Quasi van der waals epitaxy of nitride semiconductor and its applications
by:
(Electronic resources)
Subjects