Cathode sputtering (Plating process)

Reactive Sputter Deposition by: (Electronic resources)

Handbook of sputter deposition technologyfundamentals and applications for functional thin films, nano-materials and MEMS / by: (Electronic resources)

Thin film materials technologysputtering of compound materials / by: (Electronic resources)

Chemistry.

Industrial Chemistry/Chemical Engineering.

Surfaces and Interfaces, Thin Films.

Condensed Matter.

Physical Chemistry.

Cathode sputtering (Plating process)

Thin films.

Thin films