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主題
Microelectromechanical systems - Materials.
概要
作品:
3 作品在 1 項出版品 1 種語言
書目資訊
MEMS materials and processes handbook
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(書目-電子資源)
Handbook of silicon based MEMSmaterials & technologies /
by:
(書目-電子資源)
Handbook of silicon based MEMS materials and technologies
by:
(書目-電子資源)
主題
Microelectromechanical systems.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Silicon
Materials Science, general.
Circuits and Systems.
Engineering.
Microelectromechanical systems
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