Lithography.

Design for manufacturability with advanced lithography by: (Electronic resources)

Physical design and mask synthesis for directed self-assembly lithography by: (Electronic resources)

Laser heat-mode lithographyprinciple and methods / by: (Electronic resources)

Nanoscale Science and Technology.

Semiconductors.

Microwaves, RF and Optical Engineering.

Nanotechnology.

Optics, Lasers, Photonics, Optical Devices.

Photoresists.

Electronics and Microelectronics, Instrumentation.

Processor Architectures.

Circuits and Systems.

Materials Science.

Nanotechnology and Microengineering.

Lithography.

Engineering.

Optical and Electronic Materials.

Integrated circuits

Self-assembly (Chemistry)

Surface and Interface Science, Thin Films.