Microelectromechanical systems.

Fundamentals and applications of microfluidics / by: (Language materials, printed)

RF MEMS circuit design for wireless communications / by: (Language materials, printed)

Separation methods in microanalytical systems / by: (Language materials, printed)

Spintronic materials and technology / by: (Language materials, printed)

Microsensors, MEMS, and smart devices / by: (Language materials, printed)

Smart material systems and MEMS :design and development methodologies / by: (Language materials, printed)

Introduction to microfluidics / by: (Language materials, printed)

MEMS / by: (Language materials, printed)

Smart material systems and MEMS :design and development methodologies / by: (Electronic resources)

BioNanoFluidic MEMS / by: (Electronic resources)

Smart Devices and Machines for Advanced Manufacturing / by: (Electronic resources)

Dynamics of microelectromechanical systems / by: (Language materials, printed)

Post-process techniques for integrated MEMS / by: (Language materials, printed)

Micro mechatronicsmodeling, analysis, and design with MATLAB / by: (Electronic resources)

The MEMS handbook by: (Electronic resources)

The MEMS handbook by: (Electronic resources)

The MEMS handbook by: (Electronic resources)

Introduction to microelectromechanical systems engineering by: (Language materials, printed)

Silicon carbide microelectromechanical systems for harsh environments by: (Electronic resources)

Analysis and design principles of MEMS devices by: (Electronic resources)

Photonic microsystemsmicro and nanotechnology applied to optical devices and systems / by: (Electronic resources)

Multi-wafer rotating MEMS machinesturbines, generators, and engines / by: (Electronic resources)

Thermal nanosystems and nanomaterials by: (Electronic resources)

Advanced MEMS packaging by: (Electronic resources)

MEMSa practical guide to design, analysis, and applications / by: (Electronic resources)

Piezoelectric-based vibration-controlfrom macro to micro/nano scale systems / by: (Electronic resources)

Photonic microresonator research and applications by: (Electronic resources)

Mechatronic systemsfundamentals / by: (Electronic resources)

Neural networks and micromechanics by: (Electronic resources)

Introductory MEMSfabrication and applications / by: (Electronic resources)

Low-power crystal and MEMS oscillatorsthe experience of watch developments / by: (Electronic resources)

Radioisotope thin-film powered microsystems by: (Electronic resources)

MEMS materials and processes handbook by: (Electronic resources)

MEMS vibratory gyroscopes :structural approaches to improve robustness / by: (Language materials, printed)

Silicon carbide microsystems for harsh environments by: (Electronic resources)

Control technologies for emerging micro and nanoscale systems by: (Electronic resources)

Electrokinetics and Electrohydrodynamics in Microsystems by: (Electronic resources)

MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications by: (Electronic resources)

Handbook of silicon based MEMSmaterials & technologies / by: (Electronic resources)

Micromixersfundamentals, design and fabrication / by: (Electronic resources)

Microelectronic systemscircuits, systems and applications / by: (Electronic resources)

Feedback control of MEMS to atoms by: (Electronic resources)

Micro-drops and digital microfluidics by: (Electronic resources)

Sensors for mechatronics by: (Electronic resources)

Micromixersfundamentals, design, and fabrication / by: (Electronic resources)

Adhesion aspects in MEMS-NEMS by: (Electronic resources)

Biomaterials for MEMS by: (Electronic resources)

Poly-SiGe for MEMS-above-CMOS sensors by: (Electronic resources)

MEMS product engineeringhandling the diversity of an emerging technology. Best Practices for Cooperative Development / by: (Electronic resources)

Lab-on-a-chip devices and micro-total analysis systemsa practical guide / by: (Electronic resources)

Micro and nano fabricationtools and processes / by: (Electronic resources)

Introduction to micromechanisms and microactuators by: (Electronic resources)

MEMS for automotive and aerospace applications by: (Electronic resources)

Handbook of silicon based MEMS materials and technologies by: (Electronic resources)

Advanced microsystems for automotive applications 2016smart systems for the automobile of the future / by: (Electronic resources)

Piezoelectric MEMS resonators by: (Electronic resources)

Outlook and challenges of nano devices, sensors, and MEMS by: (Electronic resources)

Advanced mechatronics and MEMS devices.II by: (Electronic resources)

Piezoresistive effect of p-type single crystalline 3C-SiCsilicon carbide mechanical sensors for harsh environments / by: (Electronic resources)

Wireless MEMS networks and applications by: (Electronic resources)

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology by: (Electronic resources)

Mechanics of microsystems by: (Electronic resources)

Micro electro mechanical systems by: (Electronic resources)

Self-powered and soft polymer MEMS/NEMS devices by: (Electronic resources)

MEMS packaging by: (Electronic resources)

Sensors for mechatronics / by: (Electronic resources)

Toward inertial-navigation-on-chipthe physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes / by: (Electronic resources)

DIY MEMSfabricating microelectromechanical systems in open use labs / by: (Electronic resources)

Process variations in microsystems manufacturing by: (Electronic resources)

MEMSfield models and optimal design / by: (Electronic resources)

Reliability of high-power mechatronic systems 1aerospace and automotive applications : simulation, modeling and optimization / by: (Electronic resources)

Reliability of high-power mechatronic systems 2aerospace and automotive applications : issues, testing and analysis / by: (Electronic resources)

Case studies in micromechatronicsfrom systems to processes / by: (Electronic resources)

Levitation micro-systemsapplications to sensors and actuators / by: (Electronic resources)

MEMS product developmentfrom concept to commercialization / by: (Electronic resources)

Whole-angle MEMs gyroscopeschallenges and opportunities / by: (Electronic resources)

Advanced mems/nems fabrication and sensors by: (Electronic resources)

Micromachined circuits and devicesmicrowave to sub-millimeter applications / by: (Electronic resources)

MEMS and microfluidics in healthcaredevices and applications perspectives / by: (Electronic resources)

Dual-mass linear vibration silicon-based MEMS gyroscope by: (Electronic resources)

Intentional and inherent nonlinearities in piezoelectric energy harvesting by: (Electronic resources)