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Yang, Zhuoqing.
Overview
Works:
1 works in 1 publications in 1 languages
Titles
Advanced mems/nems fabrication and sensors
by: SpringerLink (Online service); Yang, Zhuoqing.
(Electronic resources)
Subjects
Microelectromechanical systems.
Nanoelectromechanical systems.
Electronics and Microelectronics, Instrumentation.
Cyber-physical systems, IoT.
Materials Engineering.
Nanotechnology and Microengineering.
Microfabrication.
Processing
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