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Advanced mems/nems fabrication and sensors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Advanced mems/nems fabrication and sensorsedited by Zhuoqing Yang.
other author:	Yang, Zhuoqing.
Published:	Cham :Springer International Publishing :2022.
Description:	vi, 312 p. :ill., digital ;24 cm.
Contained By:	Springer Nature eBook
Subject:	Microelectromechanical systems.
Online resource:	https://doi.org/10.1007/978-3-030-79749-2
ISBN:	9783030797492$q(electronic bk.)

Advanced mems/nems fabrication and sensors
Advanced mems/nems fabrication and sensors[electronic resource] /edited by Zhuoqing Yang. - Cham :Springer International Publishing :2022. - vi, 312 p. :ill., digital ;24 cm.

Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

ISBN: 9783030797492$q(electronic bk.)

Standard No.: 10.1007/978-3-030-79749-2doiSubjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .A38 2022

Dewey Class. No.: 621.381

Advanced mems/nems fabrication and sensors
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245 0 0 $a Advanced mems/nems fabrication and sensors $h [electronic resource] / $c edited by Zhuoqing Yang.
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505 0 $a Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.
520 $a This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Nanoelectromechanical systems. $3 321655
650 0 $a Microfabrication. $3 200385
650 1 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Cyber-physical systems, IoT. $3 836359
650 2 4 $a Materials Engineering. $3 682881
700 1 $a Yang, Zhuoqing. $3 917550
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856 4 0 $u https://doi.org/10.1007/978-3-030-79749-2
950 $a Engineering (SpringerNature-11647)