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Handbook of VLSI microlithography :p...
~
Glendinning, William B.
Handbook of VLSI microlithography :principles, technology, and applications /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Handbook of VLSI microlithography :edited by William B. Glendinning, John N. Helbert.
其他題名:
principles, technology, and applications /
其他作者:
Glendinning, William B.
出版者:
Park Ridge, N.J., U.S.A. :Noyes Publications,c1991.
面頁冊數:
xxii, 649 p. :ill. ;25 cm.
叢書名:
Materials science and process technology series
標題:
Integrated circuitsVery large scale integration.
ISBN:
0815512813 :
Handbook of VLSI microlithography :principles, technology, and applications /
Handbook of VLSI microlithography :
principles, technology, and applications /edited by William B. Glendinning, John N. Helbert. - Park Ridge, N.J., U.S.A. :Noyes Publications,c1991. - xxii, 649 p. :ill. ;25 cm. - Materials science and process technology series.
Includes bibliographical references and index.
ISBN: 0815512813 :NT$2,970
LCCN: 90023646 Subjects--Topical Terms:
180020
Integrated circuits
--Very large scale integration.
LC Class. No.: TK7874 / .H236 1991
Dewey Class. No.: 621.381/531
Handbook of VLSI microlithography :principles, technology, and applications /
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Handbook of VLSI microlithography :
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principles, technology, and applications /
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edited by William B. Glendinning, John N. Helbert.
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Noyes Publications,
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Microlithography.
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