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Semiconductor micromachining /
~
Campbell, S. A.
Semiconductor micromachining /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Semiconductor micromachining /edited by S.A. Campbell, H.J. Lewerenz.
other author:
Campbell, S. A.
Published:
Chichester, England ;Wiley,1998.
Description:
2 v. :ill. ;24 cm.
Subject:
SemiconductorsDesign and construction.
ISBN:
0471980846 (set : alk. paper)
Semiconductor micromachining /
Semiconductor micromachining /
edited by S.A. Campbell, H.J. Lewerenz. - Chichester, England ;Wiley,1998. - 2 v. :ill. ;24 cm.
Includes bibliographical references and index.
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
ISBN: 0471980846 (set : alk. paper)
LCCN: 97026052 Subjects--Topical Terms:
182501
Semiconductors
--Design and construction.
LC Class. No.: TK7871.85 / .S4295 1998
Dewey Class. No.: 621.3815/2
Semiconductor micromachining /
LDR
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090528s1998 enka b 001 0 eng
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97026052
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0471980846 (set : alk. paper)
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0471966819 (v. 1 : alk. paper) :
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NT$5474
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0471966827 (v. 2 : alk. paper) :
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NT$5474
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00044565
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DLC
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DLC
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TK7871.85
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.S4295 1998
082
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21
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621.3815/2
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Semiconductor micromachining /
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edited by S.A. Campbell, H.J. Lewerenz.
260
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Chichester, England ;
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New York :
$c
1998.
$b
Wiley,
300
$a
2 v. :
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ill. ;
$c
24 cm.
504
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Includes bibliographical references and index.
505
0
$a
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
650
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Semiconductors
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Design and construction.
$3
182501
650
$a
Micromachining.
$3
200384
650
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Microfabrication.
$3
200385
700
$a
Campbell, S. A.
$3
200382
700
$a
Lewerenz, H.- J.
$3
200383
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西方語文圖書區(四樓)
Items
2 records • Pages 1 •
1
Inventory Number
Location Name
Item Class
Material type
Call number
Usage Class
Loan Status
No. of reservations
Opac note
Attachments
320000118721
西方語文圖書區(四樓)
1圖書
一般圖書
TK7871.85 S471 v.1 1998
一般使用(Normal)
On shelf
0
320000118739
西方語文圖書區(四樓)
1圖書
一般圖書
TK7871.85 S471 v.2 1998
一般使用(Normal)
On shelf
0
2 records • Pages 1 •
1
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