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Fundamentals of microfabrication :th...
~
Madou, Marc J.
Fundamentals of microfabrication :the science of miniaturization /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Fundamentals of microfabrication :Marc J. Madou.
Reminder of title:
the science of miniaturization /
Author:
Madou, Marc J.
Published:
Boca Raton, Fla. :CRC Press,c2002.
Description:
723 p., [16] p. of plates :ill. (some col.) ;29 cm.
Subject:
Microelectronics.
ISBN:
0849308267 (alk. paper)
Fundamentals of microfabrication :the science of miniaturization /
Madou, Marc J.
Fundamentals of microfabrication :
the science of miniaturization /Marc J. Madou. - 2nd ed. - Boca Raton, Fla. :CRC Press,c2002. - 723 p., [16] p. of plates :ill. (some col.) ;29 cm.
Includes bibliographical references (p. 679-684) and index.
ISBN: 0849308267 (alk. paper)
LCCN: �01043273Subjects--Topical Terms:
182484
Microelectronics.
LC Class. No.: TK7836 / .M33 2002
Dewey Class. No.: 621.3815/2
Fundamentals of microfabrication :the science of miniaturization /
LDR
:00714cam 22002414a 450
001
152537
003
OCoLC
003
oLC
005
020805102008.0
005
20020805102008.0
008
090528s2002 fluaf b 001 0 eng
010
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�01043273
020
$a
0849308267 (alk. paper)
035
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00064162
040
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DLC
$c
DLC
$d
C#P
042
$a
pcc
049
$a
NTUA
050
0 0
$a
TK7836
$b
.M33 2002
082
0 0
$2
21
$a
621.3815/2
100
$a
Madou, Marc J.
$3
206810
245
1 0
$a
Fundamentals of microfabrication :
$b
the science of miniaturization /
$c
Marc J. Madou.
250
$a
2nd ed.
260
$a
Boca Raton, Fla. :
$c
c2002.
$b
CRC Press,
300
$a
723 p., [16] p. of plates :
$b
ill. (some col.) ;
$c
29 cm.
504
$a
Includes bibliographical references (p. 679-684) and index.
650
$a
Microelectronics.
$3
182484
650
$a
Integrated circuits
$x
Design and construction.
$3
184690
650
$a
Microelectromechanical systems
$x
Design and construction.
$3
206811
650
$a
Machining.
$3
206812
650
$a
Microelectronic packaging.
$3
182088
650
$a
Lasers
$x
Industrial applications.
$3
206813
based on 0 review(s)
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西方語文圖書區(四樓)
Items
2 records • Pages 1 •
1
Inventory Number
Location Name
Item Class
Material type
Call number
Usage Class
Loan Status
No. of reservations
Opac note
Attachments
320000167025
西方語文圖書區(四樓)
1圖書
一般圖書
TK7836 .M33 2002
一般使用(Normal)
On shelf
0
320000228439
西方語文圖書區(四樓)
1圖書
一般圖書
TK7836 M33 2002 c.2
一般使用(Normal)
On shelf
0
2 records • Pages 1 •
1
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