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Spectroscopic ellipsometry and refle...

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McGahan, William A., (1966-)

Spectroscopic ellipsometry and reflectometry :a user's guide /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Spectroscopic ellipsometry and reflectometry :Harland G. Tompkins, William A. McGahan.
Reminder of title:	a user's guide /
Author:	Tompkins, Harland G.
other author:	McGahan, William A.,
Published:	New York :Wiley,c1999.
Description:	xiv, 228 p. :ill. ;24 cm.
Notes:	"A Wiley-Interscience publication."
Subject:	Reflectometer.
ISBN:	0471181722 : NT 2650

Spectroscopic ellipsometry and reflectometry :a user's guide /
Tompkins, Harland G.

Spectroscopic ellipsometry and reflectometry :a user's guide /Harland G. Tompkins, William A. McGahan. - New York :Wiley,c1999. - xiv, 228 p. :ill. ;24 cm.

"A Wiley-Interscience publication."

Includes bibliographical references and index.

ISBN: 0471181722 : NT 2650

LCCN: 98038199Subjects--Topical Terms:

217025
Reflectometer.

LC Class. No.: QC443 / .T63 1999

Dewey Class. No.: 681.25 / T662

Spectroscopic ellipsometry and reflectometry :a user's guide /
LDR:00633cam 2200193 a 450 001 157306
005 000118081844.0
005 20000118081844.0
008 090528s1999 nyua b 001 0 eng
010 $a 98038199
020 $a 0471181722 : NT 2650
035 $a 00105447
040 $a DLC $c DLC $d DLC
050 0 0 $a QC443 $b .T63 1999
082 0 4 $a 681.25 $b T662
100 $a Tompkins, Harland G. $3 217024
245 1 0 $a Spectroscopic ellipsometry and reflectometry : $b a user's guide / $c Harland G. Tompkins, William A. McGahan.
260 $a New York : $c c1999. $b Wiley,
300 $a xiv, 228 p. : $b ill. ; $c 24 cm.
500 $a "A Wiley-Interscience publication."
504 $a Includes bibliographical references and index.
650 $a Reflectometer. $3 217025
650 $a Materials $x Optical properties. $3 217026
650 $a Thin films $x Optical properties. $3 208298
650 $a Surfaces (Technology) $3 190551
650 $a Ellipsometry. $3 217027
700 $a McGahan, William A., $d 1966- $3 217023

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320000255960

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QC443 T63 1999

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1 records • Pages 1 •
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