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Modelling of microfabrication systems /

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Dai, Weizhong.

Modelling of microfabrication systems /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Modelling of microfabrication systems /Raja Nassar, Weizhong Dai, [eds.].
other author:	Nassar, Raja.
Published:	Berlin :Springer,c2003.
Description:	x, 269 p. :ill. ;24 cm.
Series:	Microtechnology and MEMS,
Subject:	MicroelectronicsMathematical models.
ISBN:	3540002529 :

Modelling of microfabrication systems /
Modelling of microfabrication systems /Raja Nassar, Weizhong Dai, [eds.]. - Berlin :Springer,c2003. - x, 269 p. :ill. ;24 cm. - Microtechnology and MEMS,1615-8326.

Includes bibliographical references (p. [249]-261) and index.

ISBN: 3540002529 :NT$3104

LCCN: 2003050541Subjects--Topical Terms:

219695
Microelectronics
--Mathematical models.

LC Class. No.: TK7836 / .N35 2003

Dewey Class. No.: 621.381

Modelling of microfabrication systems /
LDR:00632pam 2200205 a 450 001 158651
005 19990825172129.0
008 090528s2003 gw a b 00100 eng
010 $a 2003050541
020 $a 3540002529 : $c NT$3104
035 $a 00123115
040 $a DLC $c DLC $d DLC
041 0 $a eng
042 $a pcc
050 0 0 $a TK7836 $b .N35 2003
082 0 0 $2 21 $a 621.381
245 0 0 $a Modelling of microfabrication systems / $c Raja Nassar, Weizhong Dai, [eds.].
260 $a Berlin : $c c2003. $b Springer,
300 $a x, 269 p. : $b ill. ; $c 24 cm.
440 0 $a Microtechnology and MEMS, $x 1615-8326
504 $a Includes bibliographical references (p. [249]-261) and index.
650 $a Microelectronics $x Mathematical models. $3 219695
650 $a Integrated circuits $x Mathematical models. $3 211367
650 $a Microelectromechanical systems $x Mathematical models. $3 219696
700 $a Nassar, Raja. $3 219693
700 $a Dai, Weizhong. $3 219694

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TK7836 M689 2003

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1 records • Pages 1 •
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