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SiO2 in Si microdevices /

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Itsumi, Manabu.

SiO2 in Si microdevices /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	SiO2 in Si microdevices /Manabu Itsumi.
Author:	Itsumi, Manabu.
Published:	Berlin ;Kodansha ;c2002.
Description:	xiii, 322 p. :ill. ;25 cm.
Series:	Springer series in materials science,
Subject:	Integrated circuitsVery large scale integration
ISBN:	3540433392 :

SiO2 in Si microdevices /
Itsumi, Manabu.

SiO2 in Si microdevices /Manabu Itsumi. - Berlin ;Kodansha ;c2002. - xiii, 322 p. :ill. ;25 cm. - Springer series in materials science,v. 560933-033X ;.

Includes bibliographical references and index.

ISBN: 3540433392 :NT$2995

LCCN: 2002075988Subjects--Topical Terms:

182089
Integrated circuits
--Very large scale integration

LC Class. No.: TK7874.75 / .I87 2002

Dewey Class. No.: 621.39/5

SiO2 in Si microdevices /
LDR:00627nam 2200205 a 450 001 160378
005 19980302192828.0
008 090528s2002 ja a 001 0 eng
010 $a 2002075988
020 $a 3540433392 : $c NT$2995
035 $a 00142246
040 $a DLC $c DLC
041 0 $a eng
042 $a pcc
050 4 $a TK7874.75 $b .I87 2002
082 0 0 $2 21 $a 621.39/5
100 $a Itsumi, Manabu. $3 224148
245 1 0 $a SiO2 in Si microdevices / $c Manabu Itsumi.
260 $a Berlin ; $a New York : $a Tokyo : $c c2002. $b Kodansha ; $b Springer,
300 $a xiii, 322 p. : $b ill. ; $c 25 cm.
440 0 $a Springer series in materials science, $v v. 56 $x 0933-033X ;
504 $a Includes bibliographical references and index.
650 $a Integrated circuits $x Very large scale integration $x Design and construction. $3 182089
650 $a Semiconductors $x Materials. $3 197826
650 $a Silica. $3 220441

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TK7874.75 I87 2002

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1 records • Pages 1 •
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