Enabling technology for MEMS and nan...
Baltes, H.

 

  • Enabling technology for MEMS and nanodevices /
  • Record Type: Language materials, printed : Monograph/item
    Title/Author: Enabling technology for MEMS and nanodevices /edited by H. Baltes ... [et al.].
    other author: Baltes, H.
    Published: Weinheim, Germany :Wiley-VCH,c2004.
    Description: xii, 427 p. :ill. ;25 cm.
    Series: Advanced micro & nanosystems ;
    Subject: Microelectromechanical systems.
    ISBN: 352730746X :
Items
  • 1 records • Pages 1 •
 
320000175341 西方語文圖書區(四樓) 1圖書 一般圖書 TK7875 E56 2004 一般使用(Normal) On shelf 0
  • 1 records • Pages 1 •
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