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Enabling technology for MEMS and nan...

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Baltes, H.

Enabling technology for MEMS and nanodevices /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Enabling technology for MEMS and nanodevices /edited by H. Baltes ... [et al.].
other author:	Baltes, H.
Published:	Weinheim, Germany :Wiley-VCH,c2004.
Description:	xii, 427 p. :ill. ;25 cm.
Series:	Advanced micro & nanosystems ;
Subject:	Microelectromechanical systems.
ISBN:	352730746X :

Enabling technology for MEMS and nanodevices /
Enabling technology for MEMS and nanodevices /edited by H. Baltes ... [et al.]. - Weinheim, Germany :Wiley-VCH,c2004. - xii, 427 p. :ill. ;25 cm. - Advanced micro & nanosystems ;v. 1.

Includes bibliographical references and index.

ISBN: 352730746X :NT7771Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .E53 2004

Dewey Class. No.: 620.5

Enabling technology for MEMS and nanodevices /
LDR:00534cam 2200157Ia 450 001 161084
005 20051202134608.0
008 090528s2004 gw a b 001 0 eng d
020 $a 352730746X : $c NT7771
035 $a 00147298
050 0 0 $a TK7875 $b .E53 2004
082 0 4 $2 22 $a 620.5
245 0 0 $a Enabling technology for MEMS and nanodevices / $c edited by H. Baltes ... [et al.].
260 $a Weinheim, Germany : $c c2004. $b Wiley-VCH,
300 $a xii, 427 p. : $b ill. ; $c 25 cm.
440 0 $a Advanced micro & nanosystems ; $v v. 1
504 $a Includes bibliographical references and index.
650 $a Microelectromechanical systems. $3 189825
650 $a Microelectronics. $3 182484
650 $a Nanotechnology. $3 193873
700 $a Baltes, H. $q (Henry) $3 438244

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320000175341

西方語文圖書區(四樓)

1圖書

一般圖書

TK7875 E56 2004

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1 records • Pages 1 •
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