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Hf-based high-k dielectrics :process...

Kim, Young-Hee, (1972-)

Hf-based high-k dielectrics :process development, performance characterization, and reliability /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Hf-based high-k dielectrics :Young-Hee Kim, Jack C. Lee.
Reminder of title:	process development, performance characterization, and reliability /
Author:	Kim, Young-Hee,
other author:	Lee, Jack Chung-Yeung.
Published:	[San Rafael, Calif.] :Morgan & Claypool Publishers,c2005.
Description:	x, 92 p. :ill. ;24 cm.
Notes:	This volume is a printed version of a work that appears in, "Synthesis, the digital library of engineering and computer science."
Series:	Synthesis lectures on solid state materials and devices ;
Subject:	Dielectrics.
ISBN:	1598290045 (pbk.) :

Hf-based high-k dielectrics :process development, performance characterization, and reliability /
Kim, Young-Hee,1972-

Hf-based high-k dielectrics :process development, performance characterization, and reliability /Young-Hee Kim, Jack C. Lee. - [San Rafael, Calif.] :Morgan & Claypool Publishers,c2005. - x, 92 p. :ill. ;24 cm. - Synthesis lectures on solid state materials and devices ;v. 1, no. 1.

This volume is a printed version of a work that appears in, "Synthesis, the digital library of engineering and computer science."

Includes bibliographical references.

ISBN: 1598290045 (pbk.) :NT$1150Subjects--Topical Terms:

234857
Dielectrics.

LC Class. No.: QC585 / K49 2005

Hf-based high-k dielectrics :process development, performance characterization, and reliability /
LDR:00748nam 2200157 a450 001 167449
008 090528s2005 caua 000 0 eng d
020 $a 1598290045 (pbk.) : $c NT$1150
035 $a 00198882
040 $a YRM $c YRM $d BAKER $d OCLCQ $d YDXCP
050 $a QC585 $b K49 2005
100 $a Kim, Young-Hee, $d 1972- $3 237623
245 1 0 $a Hf-based high-k dielectrics : $b process development, performance characterization, and reliability / $c Young-Hee Kim, Jack C. Lee.
260 $a [San Rafael, Calif.] : $c c2005. $b Morgan & Claypool Publishers,
300 $a x, 92 p. : $b ill. ; $c 24 cm.
440 0 $a Synthesis lectures on solid state materials and devices ; $v v. 1, no. 1
500 $a This volume is a printed version of a work that appears in, "Synthesis, the digital library of engineering and computer science."
504 $a Includes bibliographical references.
650 $a Dielectrics. $3 234857
650 $a Hafnium oxide. $3 237624
650 $a Integrated circuits $x Reliability. $3 184558
650 $a Semiconductors $x Junctions. $3 229804
650 $a Breakdown (Electricity) $3 237625
650 $a Metal oxide semiconductor field-effect transistors. $3 221791
700 $a Lee, Jack Chung-Yeung. $3 237622