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Microlithography :science and techno...

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Sheats, James R., (1948-)

Microlithography :science and technology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microlithography :edited by James R. Sheats, Bruce W. Smith.
Reminder of title:	science and technology /
other author:	Sheats, James R.,
Published:	New York :Marcel Dekker,c1998.
Description:	xii, 780 p. :ill. ;24 cm.
Subject:	MicrolithographyIndustrial applications.
Online resource:	http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html
ISBN:	0824799534 :

Microlithography :science and technology /
Microlithography :science and technology /edited by James R. Sheats, Bruce W. Smith. - New York :Marcel Dekker,c1998. - xii, 780 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 0824799534 :NT$6067

LCCN: 98016713 Subjects--Topical Terms:

239694
Microlithography
--Industrial applications.

LC Class. No.: TK7836 / .M525 1998

Dewey Class. No.: 621.3815/31

Microlithography :science and technology /
LDR:00730cam 2200193 a 450 001 168402
005 19991106084353.0
008 090528s1998 nyua b 001 0 eng
010 $a 98016713
020 $a 0824799534 : $c NT$6067
035 $a 00201406
040 $a DLC $c DLC $d DLC
041 $a eng
050 0 0 $a TK7836 $b .M525 1998
082 0 0 $2 21 $a 621.3815/31
245 0 0 $a Microlithography : $b science and technology / $c edited by James R. Sheats, Bruce W. Smith.
260 $a New York : $c c1998. $b Marcel Dekker,
300 $a xii, 780 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Microlithography $x Industrial applications. $3 239694
650 $a Integrated circuits $x Masks. $3 239695
650 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 184363
650 $a Manufacturing processes. $3 185481
700 $a Sheats, James R., $d 1948- $3 239692
700 $a Smith, Bruce W., $d 1959- $3 239693
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html $z http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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Items

1 records • Pages 1 •
1

Inventory Number

No. of reservations

320000383812

西方語文圖書區(四樓)

1圖書

一般圖書

TK7836 M626 1998

一般使用(Normal)

On shelf

0

1 records • Pages 1 •
1

Multimedia

Multimedia file
http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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