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Principles of lithography /

~

Levinson, Harry J.

Principles of lithography /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Principles of lithography /Harry J. Levinson.
Author:	Levinson, Harry J.
Published:	Bellingham, WA :SPIE Press,c2005.
Description:	xii, 423 p. :ill. ;26 cm.
Subject:	Microlithography.
Online resource:	http://www.loc.gov/catdir/toc/ecip053/2004025977.html
ISBN:	0819456608 (hbk.) :

Principles of lithography /
Levinson, Harry J.

Principles of lithography /Harry J. Levinson. - 2nd ed. - Bellingham, WA :SPIE Press,c2005. - xii, 423 p. :ill. ;26 cm.

Includes bibliographical references and index.

ISBN: 0819456608 (hbk.) :NT2484

LCCN: 2004025977Subjects--Topical Terms:

180021
Microlithography.

LC Class. No.: TK7874 / .L397 2005

Dewey Class. No.: 621.3815/31

Principles of lithography /
LDR:00721pam 22002174a 450 001 170071
003 DLC
005 20050608151233.0
008 090528s2005 waua b 001 0 eng
010 $a 2004025977
020 $a 0819456608 (hbk.) : $c NT2484
035 $a 00234106
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7874 $b .L397 2005
082 0 0 $2 22 $a 621.3815/31
100 $a Levinson, Harry J. $3 243489
245 1 0 $a Principles of lithography / $c Harry J. Levinson.
250 $a 2nd ed.
260 $a Bellingham, WA : $c c2005. $b SPIE Press,
300 $a xii, 423 p. : $b ill. ; $c 26 cm.
504 $a Includes bibliographical references and index.
650 $a Microlithography. $3 180021
650 $a Integrated circuits $x Design and construction. $3 184690
856 4 1 $3 Table of contents $u http://www.loc.gov/catdir/toc/ecip053/2004025977.html $z http://www.loc.gov/catdir/toc/ecip053/2004025977.html

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1 records • Pages 1 •
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Inventory Number

No. of reservations

320000425613

西方語文圖書區(四樓)

1圖書

一般圖書

TK7874 L665 2005

一般使用(Normal)

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1 records • Pages 1 •
1

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http://www.loc.gov/catdir/toc/ecip053/2004025977.html

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