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Resolution enhancement techniques in...

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Wong, Alfred Kwok-Kit.

Resolution enhancement techniques in optical lithography /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Resolution enhancement techniques in optical lithography /Alfred Kwok-Kit Wong.
Author:	Wong, Alfred Kwok-Kit.
Published:	Bellingham, Wash. :SPIE Press,c2001.
Description:	xvii, 214 p. :ill. ;26 cm.
Series:	Tutorial texts in optical engineering ;
Subject:	Integrated circuitsDesign and construction.
ISBN:	0819439959 (pbk.) :

Resolution enhancement techniques in optical lithography /
Wong, Alfred Kwok-Kit.

Resolution enhancement techniques in optical lithography /Alfred Kwok-Kit Wong. - Bellingham, Wash. :SPIE Press,c2001. - xvii, 214 p. :ill. ;26 cm. - Tutorial texts in optical engineering ;v. TT 47.

Includes bibliographical references (p. 189-208) and index.

ISBN: 0819439959 (pbk.) :NT1478

LCCN: 2001020028Subjects--Topical Terms:

184690
Integrated circuits
--Design and construction.

LC Class. No.: TK7874 / .W647 2001

Dewey Class. No.: 621.3815/31

Resolution enhancement techniques in optical lithography /
LDR:00670cam 22002054a 450 001 170079
003 DLC
005 20030113101721.0
008 090528s2001 waua b 001 0 eng
010 $a 2001020028
020 $a 0819439959 (pbk.) : $c NT1478
035 $a 00234114
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7874 $b .W647 2001
082 0 0 $2 21 $a 621.3815/31
100 $a Wong, Alfred Kwok-Kit. $3 243502
245 1 0 $a Resolution enhancement techniques in optical lithography / $c Alfred Kwok-Kit Wong.
260 $a Bellingham, Wash. : $c c2001. $b SPIE Press,
300 $a xvii, 214 p. : $b ill. ; $c 26 cm.
440 0 $a Tutorial texts in optical engineering ; $v v. TT 47
504 $a Includes bibliographical references (p. 189-208) and index.
650 $a Integrated circuits $x Design and construction. $3 184690
650 $a Microlithography. $3 180021

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TK7874 W872 2001

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