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Electroceramic-Based MEMS :Fabrication-Technology and Applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Electroceramic-Based MEMS :edited by Nava Setter.
Reminder of title:	Fabrication-Technology and Applications /
other author:	Setter, Nava.
Published:	Boston, MA :Springer Science+Business Media, Inc.,2005.
Description:	v.: digital
Series:	Electronic Materials: Science and Technology, ;
Subject:	Nanotechnology
Online resource:	http://dx.doi.org/10.1007/b101200
ISBN:	9780387233109 (paper)

Electroceramic-Based MEMS :Fabrication-Technology and Applications /
Electroceramic-Based MEMS :Fabrication-Technology and Applications /[electronic resource] :edited by Nava Setter. - Boston, MA :Springer Science+Business Media, Inc.,2005. - v.: digital - Electronic Materials: Science and Technology, ;9,1386-3290 ;.

ISBN: 9780387233109 (paper)Subjects--Topical Terms:

216697
Nanotechnology

LC Class. No.: TK7875 / .E42 2005

Dewey Class. No.: 621.381

Electroceramic-Based MEMS :Fabrication-Technology and Applications /
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020 $a 9780387233109 (paper)
020 $a 9780387233192 (electronic bk.)
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050 0 0 $a TK7875 $b .E42 2005
082 0 0 $2 22 $a 621.381
090 $a TK7875 $b .E38 2005
245 0 0 $a Electroceramic-Based MEMS : $b Fabrication-Technology and Applications / $c edited by Nava Setter. $h [electronic resource] :
260 # $a Boston, MA : $c 2005. $b Springer Science+Business Media, Inc.,
300 $b v.: digital
440 0 $a Electronic Materials: Science and Technology, ; $v 9, $x 1386-3290 ;
650 # 0 $a Nanotechnology $3 216697
650 # 0 $a Materials $3 252605
650 # 0 $a Electronics $3 252955
650 # 0 $a Chemistry $3 236337
650 # 0 $a Optical and Electronic Materials $3 252498
650 # 0 $a Characterization and Evaluation Materials $3 252649
650 # 0 $a Ceramics, Glass, Composites, Natural Methods $3 253474
650 # 0 $a Electronics and Microelectronics, Instrumentation $3 252956
650 # 0 $a Optical materials $3 252496
700 0 # $a Setter, Nava. $3 253475
856 4 0 $u http://libsw.nuk.edu.tw/login?url=http://dx.doi.org/10.1007/b101200 $z http://dx.doi.org/10.1007/b101200
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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1 records • Pages 1 •
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000000003423

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1圖書

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EB TK7875 E38 2005

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1 records • Pages 1 •
1

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http://libsw.nuk.edu.tw/login?url=http://dx.doi.org/10.1007/b101200

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