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Electroceramic-Based MEMS :Fabrication-Technology and Applications /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Electroceramic-Based MEMS :edited by Nava Setter.
其他題名:	Fabrication-Technology and Applications /
其他作者:	Setter, Nava.
出版者:	Boston, MA :Springer Science+Business Media, Inc.,2005.
面頁冊數:	v.: digital
叢書名:	Electronic Materials: Science and Technology, ;
標題:	Nanotechnology
電子資源:	http://dx.doi.org/10.1007/b101200
ISBN:	9780387233109 (paper)

Electroceramic-Based MEMS :Fabrication-Technology and Applications /
Electroceramic-Based MEMS :Fabrication-Technology and Applications /[electronic resource] :edited by Nava Setter. - Boston, MA :Springer Science+Business Media, Inc.,2005. - v.: digital - Electronic Materials: Science and Technology, ;9,1386-3290 ;.

ISBN: 9780387233109 (paper)Subjects--Topical Terms:

216697
Nanotechnology

LC Class. No.: TK7875 / .E42 2005

Dewey Class. No.: 621.381

Electroceramic-Based MEMS :Fabrication-Technology and Applications /
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650 # 0 $a Optical and Electronic Materials $3 252498
650 # 0 $a Characterization and Evaluation Materials $3 252649
650 # 0 $a Ceramics, Glass, Composites, Natural Methods $3 253474
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950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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http://libsw.nuk.edu.tw/login?url=http://dx.doi.org/10.1007/b101200

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