| Record Type: |
Electronic resources
: Monograph/item
|
| Title/Author: |
Mechanics of Microelectromechanical Systems /by Nicolae Lobontiu, Ephrahim Garcia. |
| Author: |
Lobontiu, Nicolae. |
| other author: |
Garcia, Ephrahim. |
| Published: |
Boston, MA :Springer Science + Business Media, Inc.,2005. |
| Description: |
v.: digital |
| Subject: |
Engineering |
| Online resource: |
http://dx.doi.org/10.1007/b100026 |
| ISBN: |
9780387230375 (electronic bk.) |