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Shape and Functional Elements of the Bulk Silicon Microtechnique :A Manual of Wet-Etched Silicon Structures /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Shape and Functional Elements of the Bulk Silicon Microtechnique :by Joachim Fruhauf.
Reminder of title:	A Manual of Wet-Etched Silicon Structures /
Author:	Fruhauf, Joachim.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005.
Description:	v.: digital
Subject:	Electronics and Microelectronics, Instrumentation
Online resource:	http://dx.doi.org/10.1007/b138230
ISBN:	9783540221098 (paper)

Shape and Functional Elements of the Bulk Silicon Microtechnique :A Manual of Wet-Etched Silicon Structures /
Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon Microtechnique :A Manual of Wet-Etched Silicon Structures /[electronic resource] :by Joachim Fruhauf. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - v.: digital

ISBN: 9783540221098 (paper)Subjects--Topical Terms:

252956
Electronics and Microelectronics, Instrumentation

LC Class. No.: QC611.8.S5 / F48 2005

Dewey Class. No.: 620.193

Shape and Functional Elements of the Bulk Silicon Microtechnique :A Manual of Wet-Etched Silicon Structures /
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