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Force Sensors for Microelectronic Packaging Applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Force Sensors for Microelectronic Packaging Applications /by Jurg Schwizer, Michael Mayer, Oliver Brand.
Author:	Schwizer, Jurg.
other author:	Brand, Oliver.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005.
Description:	v.: digital
Series:	Microtechnology and MEMS,
Subject:	Optical materials
Online resource:	http://dx.doi.org/10.1007/b138345
ISBN:	9783540221876 (paper)

Force Sensors for Microelectronic Packaging Applications /
Schwizer, Jurg.

Force Sensors for Microelectronic Packaging Applications /[electronic resource] /by Jurg Schwizer, Michael Mayer, Oliver Brand. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - v.: digital - Microtechnology and MEMS,1615-8326.

ISBN: 9783540221876 (paper)Subjects--Topical Terms:

252496
Optical materials

LC Class. No.: TK7870.15 / .S39 2005

Dewey Class. No.: 621.3'81046

Force Sensors for Microelectronic Packaging Applications /
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020 $a 9783540221876 (paper)
020 $a 9783540269458 (electronic bk.)
035 $a 00280541
050 0 4 $a TK7870.15 $b .S39 2005
082 0 4 $2 22 $a 621.3'81046
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100 0 $a Schwizer, Jurg. $3 255969
245 1 0 $a Force Sensors for Microelectronic Packaging Applications / $c by Jurg Schwizer, Michael Mayer, Oliver Brand. $h [electronic resource] /
260 # $a Berlin, Heidelberg : $c 2005. $b Springer-Verlag Berlin Heidelberg,
300 $b v.: digital
440 0 $a Microtechnology and MEMS, $x 1615-8326
650 # 0 $a Optical materials $3 252496
650 # 0 $a Nanotechnology $3 216697
650 # 0 $a Electronics $3 252955
650 # 0 $a Engineering $3 252507
650 # 0 $a System safety $3 254847
650 # 0 $a Chemistry $3 236337
650 # 0 $a Optical and Electronic Materials $3 252498
650 # 0 $a Electronics and Microelectronics, Instrumentation $3 252956
650 # 0 $a Physics and Applied Physics in Engineering $3 252550
650 # 0 $a Quality Control, Reliability, Safety and Risk $3 254848
700 0 # $a Brand, Oliver. $3 255968
700 0 # $a Mayer, Michael. $3 255967
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950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)