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Integrated Chemical Microsensor Systems in CMOS Technology /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Integrated Chemical Microsensor Systems in CMOS Technology /by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
Author:	Hierlemann, Andreas.
other author:	Fujita, Hiroyuki.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005.
Description:	v.: digital
Series:	Microtechnology and MEMS,
Subject:	Measurement Science, Instrumentation
Online resource:	http://dx.doi.org/10.1007/b138987
ISBN:	9783540237822 (paper)

Integrated Chemical Microsensor Systems in CMOS Technology /
Hierlemann, Andreas.

Integrated Chemical Microsensor Systems in CMOS Technology /[electronic resource] /by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - v.: digital - Microtechnology and MEMS,1615-8326.

ISBN: 9783540237822 (paper)Subjects--Topical Terms:

252614
Measurement Science, Instrumentation

LC Class. No.: TK7875 / .H54 2005

Dewey Class. No.: 621.39/732

Integrated Chemical Microsensor Systems in CMOS Technology /
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100 0 $a Hierlemann, Andreas. $3 255987
245 1 0 $a Integrated Chemical Microsensor Systems in CMOS Technology / $c by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. $h [electronic resource] /
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440 0 $a Microtechnology and MEMS, $x 1615-8326
650 # 0 $a Measurement Science, Instrumentation $3 252614
650 # 0 $a Optical materials $3 252496
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650 # 0 $a Electronics $3 252955
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650 # 0 $a Chemistry $3 236337
650 # 0 $a Optical and Electronic Materials $3 252498
650 # 0 $a Surfaces and Interfaces, Thin Films $3 252499
650 # 0 $a Electronics and Microelectronics, Instrumentation $3 252956
650 # 0 $a Analytical Chemistry $3 253167
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700 0 # $a Liepmann, Dorian. $3 255986
700 0 # $a Baltes, H.. $3 255984
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