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Microfabrication and nanomanufacturing /

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Jackson, Mark J.

Microfabrication and nanomanufacturing /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Microfabrication and nanomanufacturing /edited by Mark J. Jackson.
其他作者:	Jackson, Mark J.
出版者:	Boca Raton, FL :CRC/Taylor & Francis,2006.
面頁冊數:	401 p. :ill. ;27 cm.
標題:	Microelectromechanical systemsDesign and construction.
ISBN:	9780824724313

Microfabrication and nanomanufacturing /
Microfabrication and nanomanufacturing /edited by Mark J. Jackson. - Boca Raton, FL :CRC/Taylor & Francis,2006. - 401 p. :ill. ;27 cm.

Includes bibliographical references and index.

ISBN: 9780824724313

LCCN: 2005049275

Nat. Bib. No.: GBA571554bnb

Nat. Bib. Agency Control No.: 013279313UkSubjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7836 / .M523 2006

Dewey Class. No.: 620/.5

Microfabrication and nanomanufacturing /
LDR:00649cam a22002174a 450 001 176693
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008 090528s2006 flua b 001 0 eng
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015 $2 bnb $a GBA571554
016 7 $2 Uk $a 013279313
020 $a 9780824724313
020 $a 0824724313 : $c NT$4758
035 $a 00283148
040 $a DLC $c DLC $d BAKER $d C#P $d DLC $d UKM
042 $a pcc
050 0 0 $a TK7836 $b .M523 2006
082 0 0 $2 22 $a 620/.5
245 0 0 $a Microfabrication and nanomanufacturing / $c edited by Mark J. Jackson.
260 $a Boca Raton, FL : $c 2006. $b CRC/Taylor & Francis,
300 $a 401 p. : $b ill. ; $c 27 cm.
504 $a Includes bibliographical references and index.
650 $a Microelectromechanical systems $x Design and construction. $3 206811
650 $a Microelectronics. $3 182484
650 $a Integrated circuits $x Design and construction. $3 184690
700 $a Jackson, Mark J. $3 257266

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