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Fundamentals of semiconductor manufa...
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May, Gary S.
Fundamentals of semiconductor manufacturing and process control /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Fundamentals of semiconductor manufacturing and process control /Gary S. May, Costas J. Spanos.
Author:
May, Gary S.
other author:
Spanos, Costas J.
Published:
Hoboken, N.J. :Wiley-Interscience,c2006.
Description:
xix, 463 p. :ill. ;25 cm.
Subject:
SemiconductorsDesign and construction.
ISBN:
9780471784067
Fundamentals of semiconductor manufacturing and process control /
May, Gary S.
Fundamentals of semiconductor manufacturing and process control /
Gary S. May, Costas J. Spanos. - Hoboken, N.J. :Wiley-Interscience,c2006. - xix, 463 p. :ill. ;25 cm.
Includes bibliographical references and index.
ISBN: 9780471784067
LCCN: 2005028448
Nat. Bib. No.: GBA627486bnbSubjects--Topical Terms:
182501
Semiconductors
--Design and construction.
LC Class. No.: TK7871.85 / .M466 2006
Dewey Class. No.: 621.3815/2
Fundamentals of semiconductor manufacturing and process control /
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Gary S. May, Costas J. Spanos.
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c2006.
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Wiley-Interscience,
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IEEE ;
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xix, 463 p. :
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ill. ;
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25 cm.
504
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Includes bibliographical references and index.
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Semiconductors
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Design and construction.
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182501
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Integrated circuits
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Design and construction.
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184690
650
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Process control
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Statistical methods.
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181914
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Spanos, Costas J.
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257814
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320000217689
西方語文圖書區(四樓)
1圖書
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TK7871.85 M466 2006
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1 records • Pages 1 •
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