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Micro process engineering :fundament...

Kockmann, Norbert.

Micro process engineering :fundamentals, devices, fabrication, and applications /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Micro process engineering :volume editor, Norbert Kockmann.
Reminder of title:	fundamentals, devices, fabrication, and applications /
other author:	Kockmann, Norbert.
Published:	Weinheim :Wiley-VCH ,c2006.
Description:	xxii, 507 p. :ill. ;25 cm.
Series:	Advanced micro & nanosystems ;
Subject:	Microtechnology.
ISBN:	9783527312467

Micro process engineering :fundamentals, devices, fabrication, and applications /
Micro process engineering :fundamentals, devices, fabrication, and applications /volume editor, Norbert Kockmann. - Weinheim :Wiley-VCH ,c2006. - xxii, 507 p. :ill. ;25 cm. - Advanced micro & nanosystems ;v. 5.

Includes bibliographical references and index.

ISBN: 9783527312467

LCCN: 2006296404

Nat. Bib. No.: GBA595500bnbSubjects--Topical Terms:

258003
Microtechnology.

LC Class. No.: TS183 / .M52 2006

Dewey Class. No.: 670.42

Micro process engineering :fundamentals, devices, fabrication, and applications /
LDR:00736nam 2200229 a 450 001 177024
005 20070831082555.0
008 090528s2006 gw a b 001 0 eng d
010 $a 2006296404
015 $2 bnb $a GBA595500
020 $a 9783527312467
020 $a 3527312463 : $c NT$7412
035 $a 00284160
040 $a UKM $c UKM $d BAKER $d DLC
041 0 $a eng
042 $a lccopycat
050 0 0 $a TS183 $b .M52 2006
082 0 4 $2 22 $a 670.42
245 0 0 $a Micro process engineering : $b fundamentals, devices, fabrication, and applications / $c volume editor, Norbert Kockmann.
260 $a Weinheim : $c c2006. $b Wiley-VCH ,
300 $a xxii, 507 p. : $b ill. ; $c 25 cm.
440 0 $a Advanced micro & nanosystems ; $v v. 5
504 $a Includes bibliographical references and index.
650 $a Microtechnology. $3 258003
650 $a Production engineering. $3 199955
700 $a Kockmann, Norbert. $3 258002