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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /by J. Laconte, D. Flandre, J. -P. Raskin.
Author:	Laconte, J..
other author:	Flandre, D..
Published:	Boston, MA :Springer,2006.
Description:	v.: digital
Subject:	Engineering
Online resource:	http://dx.doi.org/10.1007/0-387-28843-0
ISBN:	9780387288420 (paper)

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /
Laconte, J..

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /[electronic resource] /by J. Laconte, D. Flandre, J. -P. Raskin. - Boston, MA :Springer,2006. - v.: digital

ISBN: 9780387288420 (paper)Subjects--Topical Terms:

252507
Engineering

LC Class. No.: QC168 / .L33 2006

Dewey Class. No.: 621.3815/2

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /
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650 # 0 $a Particles (Nuclear physics) $3 204127
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650 # 0 $a Electronics and Microelectronics, Instrumentation $3 252956
650 # 0 $a Physics and Applied Physics in Engineering $3 252550
650 # 0 $a Applied Optics, Optoelectronics, Optical Devices $3 252504
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