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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /by J. Laconte, D. Flandre, J. -P. Raskin.
作者:	Laconte, J..
其他作者:	Flandre, D..
出版者:	Boston, MA :Springer,2006.
面頁冊數:	v.: digital
標題:	Engineering
電子資源:	http://dx.doi.org/10.1007/0-387-28843-0
ISBN:	9780387288420 (paper)

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /
Laconte, J..

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /[electronic resource] /by J. Laconte, D. Flandre, J. -P. Raskin. - Boston, MA :Springer,2006. - v.: digital

ISBN: 9780387288420 (paper)Subjects--Topical Terms:

252507
Engineering

LC Class. No.: QC168 / .L33 2006

Dewey Class. No.: 621.3815/2

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration /
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