| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Microsystem technology /W. Menz, J. Mohr, O. Paul. |
| Author: |
Menz, W. |
| other author: |
Mohr, J. |
| Published: |
New York :Wiley-VCH,c2001. |
| Description: |
xii, 500 p. :ill. ;25 cm. |
| Subject: |
Microelectronics. |
| ISBN: |
3527296344 |