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Fundamental principles of optical li...

Mack, Chris A.

Fundamental principles of optical lithography :the science of microfabrication /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Fundamental principles of optical lithography :Chris Mack.
其他題名:	the science of microfabrication /
作者:	Mack, Chris A.
出版者:	Chichester, West Sussex, England ;Wiley,c2007.
面頁冊數:	xvii, 515 p. :ill. ;25 cm.
標題:	MicrolithographyIndustrial applications.
ISBN:	0470018933

Fundamental principles of optical lithography :the science of microfabrication /
Mack, Chris A.

Fundamental principles of optical lithography :the science of microfabrication /Chris Mack. - Chichester, West Sussex, England ;Wiley,c2007. - xvii, 515 p. :ill. ;25 cm.

Includes bibliographical references and index.

ISBN: 0470018933

LCCN: 2007044548

Nat. Bib. No.: GBA791483bnb Subjects--Topical Terms:

239694
Microlithography
--Industrial applications.

LC Class. No.: TK7874 / .M196 2007

Dewey Class. No.: 621.3815/31

Fundamental principles of optical lithography :the science of microfabrication /
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003 OCoLC
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008 090528s2007 enka b 001 0 eng
010 $a 2007044548
015 $2 bnb $a GBA791483
019 $a 166378250
020 $a 0470018933
020 $a 9780470018934
020 $a 9780470727300 (pbk.)
020 $a 0470727306 (pbk.) : $c NT$2231
035 $a 00319185
040 $a DLC $c DLC $d BAKER $d BGU $d BTCTA $d UKM $d YDX $d YDXCP
050 0 0 $a TK7874 $b .M196 2007
082 0 0 $2 22 $a 621.3815/31
100 $a Mack, Chris A. $3 243499
245 1 0 $a Fundamental principles of optical lithography : $b the science of microfabrication / $c Chris Mack.
260 $a Chichester, West Sussex, England ; $a Hoboken, NJ, USA : $c c2007. $b Wiley,
300 $a xvii, 515 p. : $b ill. ; $c 25 cm.
504 $a Includes bibliographical references and index.
650 $a Microlithography $x Industrial applications. $3 239694
650 $a Integrated circuits $x Design and construction. $3 184690