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Post-process techniques for integrat...
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Sedky, Sherif.
Post-process techniques for integrated MEMS /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Post-process techniques for integrated MEMS /Sherif Sedky.
Author:
Sedky, Sherif.
Published:
Boston :Artech House,c2006.
Description:
xiv, 207 p. :ill. ;24 cm.
Series:
Microelectromechanical systems series
Subject:
Microelectromechanical systems.
ISBN:
1580539017 :
Post-process techniques for integrated MEMS /
Sedky, Sherif.
Post-process techniques for integrated MEMS /
Sherif Sedky. - Boston :Artech House,c2006. - xiv, 207 p. :ill. ;24 cm. - Microelectromechanical systems series.
Includes bibliographical references and index.
ISBN: 1580539017 :NT$3257
LCCN: 2005050833Subjects--Topical Terms:
189825
Microelectromechanical systems.
LC Class. No.: TK7875 / .S43 2006
Dewey Class. No.: 621.381
Post-process techniques for integrated MEMS /
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Sherif Sedky.
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Artech House,
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xiv, 207 p. :
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Microelectromechanical systems series
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Includes bibliographical references and index.
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Microelectromechanical systems.
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189825
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西方語文圖書區(四樓)
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1 records • Pages 1 •
1
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320000459059
西方語文圖書區(四樓)
1圖書
一般圖書
TK7875 S448 2006
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1 records • Pages 1 •
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