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Microelectronic applications of chem...

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Li, Yuzhuo.

Microelectronic applications of chemical mechanical planarization /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li.
other author:	Li, Yuzhuo.
Published:	Hoboken, N.J. :John Wiley,c2008.
Description:	xxv, 734 p. :ill. ;25 cm.
Notes:	"Wiley Interscience."
Subject:	Integrated circuitsDesign and construction.
Online resource:	http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html
ISBN:	9780471719199 :

Microelectronic applications of chemical mechanical planarization /
Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li. - Hoboken, N.J. :John Wiley,c2008. - xxv, 734 p. :ill. ;25 cm.

"Wiley Interscience."

Includes bibliographical references and index.

ISBN: 9780471719199 :NT$3784

LCCN: 2007015557Subjects--Topical Terms:

184690
Integrated circuits
--Design and construction.

LC Class. No.: TK7874 / .M4675 2007

Dewey Class. No.: 621.3815

Microelectronic applications of chemical mechanical planarization /
LDR:01113cam 2200229 a 450 001 188110
005 20080611172449.0
008 090528s2008 njua b 001 0 eng
010 $a 2007015557
020 $a 9780471719199 : $c NT$3784
035 $a 00339769
040 $a DLC $c DLC $d DLC
041 0 $a eng
050 0 0 $a TK7874 $b .M4675 2007
082 0 0 $2 22 $a 621.3815
245 0 0 $a Microelectronic applications of chemical mechanical planarization / $c edited by Yuzhuo Li.
260 $a Hoboken, N.J. : $c c2008. $b John Wiley,
300 $a xxv, 734 p. : $b ill. ; $c 25 cm.
500 $a "Wiley Interscience."
504 $a Includes bibliographical references and index.
650 $a Integrated circuits $x Design and construction. $3 184690
650 $a Chemical mechanical planarization. $3 265685
650 $a Microelectronics $x Materials. $3 184283
700 $a Li, Yuzhuo. $3 265684
856 4 1 $3 Table of contents only $u http://www.loc.gov/catdir/toc/ecip0715/2007015557.html $z http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
856 4 2 $3 Contributor biographical information $u http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html $z http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html $z http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html

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Items

1 records • Pages 1 •
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Inventory Number

No. of reservations

320000459182

西方語文圖書區(四樓)

1圖書

一般圖書

TK7874 M626 2008

一般使用(Normal)

On shelf

0

1 records • Pages 1 •
1

Multimedia

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http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html

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