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Scaling issues and design of MEMS /

~

Baglio, S.

Scaling issues and design of MEMS /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Scaling issues and design of MEMS /Salvatore Baglio, Salvatore Castorina, Nicolo Savalli.
remainder title:	Scaling issues and design of microelectromechanical systems
Author:	Baglio, S.
other author:	Savalli, Nicol.
Published:	Chichester, West Sussex, England ;John Wiley & Sons,c2007.
Description:	xiii, 229 p. :ill. ;24 cm.
Subject:	Microelectromechanical systemsDesign and construction.
ISBN:	9780470016992

Scaling issues and design of MEMS /
Baglio, S.

Scaling issues and design of MEMS /Scaling issues and design of microelectromechanical systemsSalvatore Baglio, Salvatore Castorina, Nicolo Savalli. - Chichester, West Sussex, England ;John Wiley & Sons,c2007. - xiii, 229 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780470016992

LCCN: 2007037324Subjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .B34 2007

Dewey Class. No.: 620/.5

Scaling issues and design of MEMS /
LDR:00710cam a2200193 a 450 001 188338
005 20080625085509.0
008 090528s2007 enka b 001 0 eng
010 $a 2007037324
020 $a 9780470016992
020 $a 047001699X : $c NT$3515
035 $a 00340301
040 $a DLC $c DLC $d BAKER $d BWKUK $d DLC $d YDXCP
050 0 0 $a TK7875 $b .B34 2007
082 0 0 $2 22 $a 620/.5
100 $a Baglio, S. $3 280541
245 1 0 $a Scaling issues and design of MEMS / $c Salvatore Baglio, Salvatore Castorina, Nicolo Savalli.
246 3 $a Scaling issues and design of microelectromechanical systems
260 $a Chichester, West Sussex, England ; $a Hoboken, NJ : $c c2007. $b John Wiley & Sons,
300 $a xiii, 229 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Microelectromechanical systems $x Design and construction. $3 206811
700 $a Savalli, Nicol. $3 282971
700 $a Castorina, Salvatore. $3 282970

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320000469330

西方語文圖書區(四樓)

1圖書

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TK7875 B146 2007

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1 records • Pages 1 •
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