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Reactive Sputter Deposition

Record Type:	Electronic resources : Monograph/item
Title/Author:	Reactive Sputter Depositionedited by Diederik Depla, Stijn Mahieu.
other author:	Depla, Diederik.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2008.
Description:	xviii, 570 p. :ill. (some col.), digital ;25 cm.
Series:	Springer Series in Materials Science,
Contained By:	Springer eBooks
Subject:	Cathode sputtering (Plating process)
Online resource:	https://doi.org/10.1007/978-3-540-76664-3
ISBN:	9783540766629 (paper)

Reactive Sputter Deposition
Reactive Sputter Deposition[electronic resource] /edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2008. - xviii, 570 p. :ill. (some col.), digital ;25 cm. - Springer Series in Materials Science,1090933-033X ;.

ISBN: 9783540766629 (paper)Subjects--Topical Terms:

283845
Cathode sputtering (Plating process)

Dewey Class. No.: 621.38152

Reactive Sputter Deposition
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020 $a 9783540766629 (paper)
020 $a 9783540766643 (electronic bk.)
035 $a 00341383
082 0 4 $2 22 $a 621.38152
090 $a TK7871.88 $b .R281 2008
245 0 0 $a Reactive Sputter Deposition $c edited by Diederik Depla, Stijn Mahieu. $h [electronic resource] /
260 # $a Berlin, Heidelberg : $c 2008. $b Springer-Verlag Berlin Heidelberg,
300 $a xviii, 570 p. : $b ill. (some col.), digital ; $c 25 cm.
440 0 $a Springer Series in Materials Science, $v 109 $x 0933-033X ;
650 # 0 $a Cathode sputtering (Plating process) $3 283845
650 # 0 $a Thin films. $3 203678
650 # 0 $a Chemistry. $3 188628
650 # 0 $a Condensed Matter. $3 273690
650 # 0 $a Industrial Chemistry/Chemical Engineering. $3 273974
650 # 0 $a Physical Chemistry. $3 273698
650 # 0 $a Surfaces and Interfaces, Thin Films. $3 274441
700 0 # $a Depla, Diederik. $3 283843
700 0 # $a Mahieu, Stijn. $3 283844
710 0 # $a SpringerLink (Online service) $3 273601
773 0 # $t Springer eBooks
856 4 0 $u http://libsw.nuk.edu.tw/login?url=https://doi.org/10.1007/978-3-540-76664-3 $z https://doi.org/10.1007/978-3-540-76664-3
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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000000013149

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1圖書

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EB TK7871.88 D421 2008

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1 records • Pages 1 •
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http://libsw.nuk.edu.tw/login?url=https://doi.org/10.1007/978-3-540-76664-3

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