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Nanolithography and patterning techn...

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Bucknall, David G.

Nanolithography and patterning techniques in microelectronics

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanolithography and patterning techniques in microelectronicsedited by David G. Bucknall.
other author:	Bucknall, David G.
Published:	Boca Raton, FL :Woodhead Pub. ;c2005.
Description:	xiv, 409 p. :ill. ;24 cm.
Notes:	Title from e-book title screen (viewed October 16, 2007).
Series:	Woodhead Publishing in materials
Subject:	Microlithography.
Online resource:	Connect to MyiLibrary resource
ISBN:	9786610568338

Nanolithography and patterning techniques in microelectronics
Nanolithography and patterning techniques in microelectronics[electronic resource] /edited by David G. Bucknall. - Boca Raton, FL :Woodhead Pub. ;c2005. - xiv, 409 p. :ill. ;24 cm. - Woodhead Publishing in materials.

Title from e-book title screen (viewed October 16, 2007).

Includes bibliographical references and index.

Electronic reproduction.
UK :
MyiLibrary,
2007

Access may be limited to MIL affiliated libraries.

ISBN: 9786610568338

LCCN: 2006365086Subjects--Topical Terms:

180021
Microlithography.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7874 / .N318 2005eb

Dewey Class. No.: 621.3815/31

Nanolithography and patterning techniques in microelectronics
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007 cr zn |
008 090528s2005 enka sb 001 0 eng d
010 $a 2006365086
020 $a 9786610568338
020 $z 1845690907 (electronic bk.)
020 $z 1855739313 (Cloth)
035 $a 00346754
040 $a UK-RwCLS $c UK-RwCLS
050 1 4 $a TK7874 $b .N318 2005eb
082 0 4 $2 22 $a 621.3815/31
245 0 0 $a Nanolithography and patterning techniques in microelectronics $c edited by David G. Bucknall. $h [electronic resource] /
260 # $a Boca Raton, FL : $a Cambridge : $c c2005. $b Woodhead Pub. ; $b CRC Press,
300 $a xiv, 409 p. : $b ill. ; $c 24 cm.
440 0 $a Woodhead Publishing in materials
500 $a Title from e-book title screen (viewed October 16, 2007).
504 $a Includes bibliographical references and index.
533 $a Electronic reproduction. $b UK : $c MyiLibrary, $d 2007 $n Access may be limited to MIL affiliated libraries. $n Available via World Wide Web.
650 # 0 $a Microlithography. $3 180021
650 # 0 $a Nanotechnology. $3 193873
655 # 0 $a Electronic books. $2 local. $3 214472
700 0 # $a Bucknall, David G. $3 291834
710 0 # $a MyiLibrary. $3 286823
856 4 # $u http://libsw.nuk.edu.tw:81/login?url=http://www.myilibrary.com?id=56833 $z Connect to MyiLibrary resource

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1 records • Pages 1 •
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Inventory Number

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000000016451

電子館藏

1圖書

電子書

EB TK7874 B922 2005

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1 records • Pages 1 •
1

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http://libsw.nuk.edu.tw:81/login?url=http://www.myilibrary.com?id=56833

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