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The MEMS handbook

El-Hak, M. Gad.

The MEMS handbook

Record Type:	Electronic resources : Monograph/item
Title/Author:	The MEMS handbookedited by Mohamed Gad-el-Hak.
remainder title:	MEMS, applications
other author:	El-Hak, M. Gad.
Published:	Boca Raton, Fla. ;CRC,2006.
Description:	3 v. (various pagings) ;27 cm.
Notes:	Title from e-book title screen (viewed October 15, 2007).
Series:	Mechanical engineering series
Subject:	Microelectronics.
Online resource:	Connect to MyiLibrary resource
ISBN:	9786610643271

The MEMS handbook
The MEMS handbook[electronic resource] /MEMS, applicationsedited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, Fla. ;CRC,2006. - 3 v. (various pagings) ;27 cm. - Mechanical engineering series.

Title from e-book title screen (viewed October 15, 2007).

Includes bibliographical references and index.

The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.

Electronic reproduction.
UK :
MyiLibrary,
2007

Access may be limited to MIL affiliated libraries.

ISBN: 9786610643271Subjects--Topical Terms:

182484
Microelectronics.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875 / .M4536 2006eb

Dewey Class. No.: 621.3'81

The MEMS handbook
LDR:01383nmm _22003133a_450 001 192272
006 m d
007 cr zn |
008 090528s2006 flu esb 001 0 eng d
020 $a 9786610643271
020 $z 0849391385 (Cloth)
020 $z 1420036564 (electronic bk.)
035 $a 00346834
040 $a UK-RwCLS $c UK-RwCLS
050 1 4 $a TK7875 $b .M4536 2006eb
082 0 4 $2 22 $a 621.3'81
245 0 4 $a The MEMS handbook $c edited by Mohamed Gad-el-Hak. $h [electronic resource] /
246 3 # $a MEMS, applications
246 3 # $a MEMS, design and fabrication
246 3 # $a MEMS, introduction and fundamentals
250 $a 2nd ed.
260 # $a Boca Raton, Fla. ; $a London : $c 2006. $b CRC,
300 $a 3 v. (various pagings) ; $c 27 cm.
366 $b 20050515 $c IP
440 0 $a Mechanical engineering series
500 $a Title from e-book title screen (viewed October 15, 2007).
504 $a Includes bibliographical references and index.
520 # $a The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.
533 $a Electronic reproduction. $b UK : $c MyiLibrary, $d 2007 $n Access may be limited to MIL affiliated libraries. $n Available via World Wide Web.
650 # 0 $a Microelectronics. $3 182484
650 # 0 $a Nanotechnology. $3 193873
650 # 0 $a Microelectromechanical systems. $3 189825
655 # 0 $a Electronic books. $2 local. $3 214472
700 0 # $a El-Hak, M. Gad. $3 292000
710 0 # $a MyiLibrary. $3 286823
856 4 # $u http://libsw.nuk.edu.tw:81/login?url=http://www.myilibrary.com?id=64327 $z Connect to MyiLibrary resource