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Microlithographyscience and technology /

MyiLibrary.

Microlithographyscience and technology /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Microlithographyedited by Kazuaki Suzuki, Bruce W. Smith.
Reminder of title:	science and technology /
other author:	Suzuki, Kazuaki.
Published:	Boca Raton :CRC Press,c2007.
Description:	848 p. :ill. ;27 cm.
Notes:	Title from e-book title screen (viewed October 15, 2007).
Subject:	MicrolithographyIndustrial applications.
Online resource:	Connect to MyiLibrary resource
ISBN:	9786610809639

Microlithographyscience and technology /
Microlithographyscience and technology /[electronic resource] :edited by Kazuaki Suzuki, Bruce W. Smith. - 2nd ed. - Boca Raton :CRC Press,c2007. - 848 p. :ill. ;27 cm. - Optical science and engineering ;126. - Optical science and engineering (Boca Raton, Fla.) ;102..

Title from e-book title screen (viewed October 15, 2007).

Includes bibliographical references and index.

Electronic reproduction.
UK :
MyiLibrary,
2007

Access may be limited to MIL affiliated libraries.

ISBN: 9786610809639

LCCN: 2006031516

Nat. Bib. No.: GBA696464bnb

Nat. Bib. Agency Control No.: 013602008UkSubjects--Topical Terms:

239694
Microlithography
--Industrial applications.Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7836 / .M525 2007eb

Dewey Class. No.: 621.3815/31

Microlithographyscience and technology /
LDR:01152nmm _22003013a_450 001 192943
003 DLC
005 20070828155615.0
006 m d
007 cr zn |
008 090528s2007 flua sb 001 0 eng
010 $a 2006031516
015 $2 bnb $a GBA696464
016 7 $2 Uk $a 013602008
020 $a 9786610809639
020 $z 0824790243 (Cloth)
035 $a 00347505
040 $a UK-RwCLS $c UK-RwCLS
050 1 4 $a TK7836 $b .M525 2007eb
082 0 4 $2 22 $a 621.3815/31
245 0 0 $a Microlithography $b science and technology / $c edited by Kazuaki Suzuki, Bruce W. Smith. $h [electronic resource] :
250 $a 2nd ed.
260 # $a Boca Raton : $c c2007. $b CRC Press,
300 $a 848 p. : $b ill. ; $c 27 cm.
490 1 $a Optical science and engineering ; $v 126
500 $a Title from e-book title screen (viewed October 15, 2007).
504 $a Includes bibliographical references and index.
533 $a Electronic reproduction. $b UK : $c MyiLibrary, $d 2007 $n Access may be limited to MIL affiliated libraries. $n Available via World Wide Web.
650 # 0 $a Microlithography $x Industrial applications. $3 239694
650 # 0 $a Integrated circuits $x Masks. $3 239695
650 # 0 $a Metal oxide semiconductors, Complementary $x Design and construction. $3 184363
650 # 0 $a Manufacturing processes. $3 185481
655 # 0 $a Electronic books. $2 local. $3 214472
700 0 # $a Suzuki, Kazuaki. $3 293277
700 0 # $a Smith, Bruce W., $d 1959- $3 239693
710 0 # $a MyiLibrary. $3 286823
830 0 $a Optical science and engineering (Boca Raton, Fla.) ; $v 102. $3 438193
856 4 # $u http://libsw.nuk.edu.tw:81/login?url=http://www.myilibrary.com?id=80963 $z Connect to MyiLibrary resource