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Silicon devices and process integrat...

El-Kareh, Badih.

Silicon devices and process integrationdeep submicron and nano-scale technologies /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Silicon devices and process integrationby Badih El-Kareh.
Reminder of title:	deep submicron and nano-scale technologies /
Author:	El-Kareh, Badih.
Published:	Boston, MA :Springer US,2009.
Description:	xxv, 597 p. :ill.,digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Metal oxide semiconductors, Complementary.
Online resource:	http://dx.doi.org/10.1007/978-0-387-69010-0
ISBN:	9780387690100 (electronic bk.)

Silicon devices and process integrationdeep submicron and nano-scale technologies /
El-Kareh, Badih.

Silicon devices and process integrationdeep submicron and nano-scale technologies /[electronic resource] :by Badih El-Kareh. - Boston, MA :Springer US,2009. - xxv, 597 p. :ill.,digital ;24 cm.

ISBN: 9780387690100 (electronic bk.)Subjects--Topical Terms:

184467
Metal oxide semiconductors, Complementary.

LC Class. No.: TK7871.99.M44 / E45 2009

Dewey Class. No.: 621.3815

Silicon devices and process integrationdeep submicron and nano-scale technologies /
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