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Low pressure plasmas and microstruct...
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Franz, Gerhard.
Low pressure plasmas and microstructuring technology
Record Type:
Electronic resources : Monograph/item
Title/Author:
Low pressure plasmas and microstructuring technologyby Gerhard Franz.
Author:
Franz, Gerhard.
Published:
Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009.
Description:
xxiv, 732 p. :ill., digital ;24 cm.
Contained By:
Springer eBooks
Subject:
Electronics and Microelectronics, Instrumentation.
Online resource:
http://libsw.nuk.edu.tw:81/login?url=http://dx.doi.org/10.1007/978-3-540-85849-2
ISBN:
9783540858492 (electronic bk.)
Low pressure plasmas and microstructuring technology
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
[electronic resource] /by Gerhard Franz. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009. - xxiv, 732 p. :ill., digital ;24 cm.
ISBN: 9783540858492 (electronic bk.)Subjects--Topical Terms:
274412
Electronics and Microelectronics, Instrumentation.
LC Class. No.: TA2020 / .F73 2009
Dewey Class. No.: 621.044
Low pressure plasmas and microstructuring technology
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Low pressure plasmas and microstructuring technology
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[electronic resource] /
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by Gerhard Franz.
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Berlin, Heidelberg :
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2009.
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Springer-Verlag Berlin Heidelberg,
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xxiv, 732 p. :
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ill., digital ;
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24 cm.
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Electronics and Microelectronics, Instrumentation.
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Atomic and Molecular Structure and Spectra.
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275996
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Surfaces and Interfaces, Thin Films.
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282445
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# 0
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Plasma etching.
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225107
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Optical and Electronic Materials.
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274099
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Chemistry and Materials Science (Springer-11644)
based on 0 review(s)
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電子館藏
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EB TA2020 F837 2009
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1 records • Pages 1 •
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http://libsw.nuk.edu.tw:81/login?url=http://dx.doi.org/10.1007/978-3-540-85849-2
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