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於陽極氧化鋁基板上製作氧化鋅薄膜之研究 = Fabrication st...

國立高雄大學電機工程學系碩士班

於陽極氧化鋁基板上製作氧化鋅薄膜之研究 = Fabrication study of ZnO thin film on anodic Aluminum oxide substrates

Record Type:	Language materials, printed : monographic
Paralel Title:	Fabrication study of ZnO thin film on anodic Aluminum oxide substrates
Author:	葉紋彬,
Secondary Intellectual Responsibility:	國立高雄大學
Place of Publication:	[高雄市]
Published:	撰者;
Year of Publication:	2009[民98]
Description:	101面圖、表 : 30公分;
Subject:	光偵測器
Subject:	furnace treatment
Notes:	指導教授：藍文厚
Notes:	參考書目：面
Summary:	本論文使用蒸鍍之鋅薄膜及其後續之高溫爐管氧化法成長氧化鋅。以多孔性陽極氧化鋁做為基板，於其上成長製作氧化鋅薄膜。藉由陽極處理時間的改變，製作出不同膜厚的陽極氧化鋁基板，探討各式基板與製程對形成氧化鋅結構之差異。並於氧化鋅薄膜上製作金半金光導偵測元件，研究元件的電流-電壓特性以及光響應分析，探討元件使用上之特性與限制。使用多孔性陽極氧化鋁做為基板，製成的氧化鋅光偵測器，可以有效地改善光響應之特性。 With the anodic aluminium oxide (AAO) as substrate, the Zinc oxide (ZnO) films were prepared by the Zn evaporated on such substrate with following oxidation process. The material properties of the ZnO films with different substrate anodic conditions were studied. With following process, the ZnO metal semiconductor metal (MSM) photodetector was fabricated. The current voltage and photo response behaviors were studied. The AAO substrate shows an effective method to improve the response properties of ZnO photodetector.

於陽極氧化鋁基板上製作氧化鋅薄膜之研究 = Fabrication study of ZnO thin film on anodic Aluminum oxide substrates
葉, 紋彬

於陽極氧化鋁基板上製作氧化鋅薄膜之研究 = Fabrication study of ZnO thin film on anodic Aluminum oxide substrates / 葉紋彬撰 - [高雄市] : 撰者, 2009[民98]. - 101面 ; 圖、表 ; 30公分.
指導教授：藍文厚參考書目：面.
光偵測器furnace treatment

於陽極氧化鋁基板上製作氧化鋅薄膜之研究 = Fabrication study of ZnO thin film on anodic Aluminum oxide substrates
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330 $a 本論文使用蒸鍍之鋅薄膜及其後續之高溫爐管氧化法成長氧化鋅。以多孔性陽極氧化鋁做為基板，於其上成長製作氧化鋅薄膜。藉由陽極處理時間的改變，製作出不同膜厚的陽極氧化鋁基板，探討各式基板與製程對形成氧化鋅結構之差異。並於氧化鋅薄膜上製作金半金光導偵測元件，研究元件的電流-電壓特性以及光響應分析，探討元件使用上之特性與限制。使用多孔性陽極氧化鋁做為基板，製成的氧化鋅光偵測器，可以有效地改善光響應之特性。 With the anodic aluminium oxide (AAO) as substrate, the Zinc oxide (ZnO) films were prepared by the Zn evaporated on such substrate with following oxidation process. The material properties of the ZnO films with different substrate anodic conditions were studied. With following process, the ZnO metal semiconductor metal (MSM) photodetector was fabricated. The current voltage and photo response behaviors were studied. The AAO substrate shows an effective method to improve the response properties of ZnO photodetector.
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