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以化學沉積法製備掺鋁氧化鋅薄膜之研究 = Investigation o...

國立高雄大學電機工程學系碩士班

以化學沉積法製備掺鋁氧化鋅薄膜之研究 = Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition

Record Type:	Language materials, printed : monographic
Paralel Title:	Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition
Author:	徐鈺婷,
Secondary Intellectual Responsibility:	國立高雄大學
Place of Publication:	[高雄市]
Published:	撰者;
Year of Publication:	2009[民98]
Description:	100面圖、表 : 30公分;
Subject:	噴霧熱解法
Subject:	aluminum doped zinc oxide (AZO)
Online resource:	http://handle.ncl.edu.tw/11296/ndltd/45751184767712646776
Notes:	參考書目：面
Notes:	指導教授：藍文厚
Summary:	本論文以溶膠-凝膠法及噴霧熱解法在玻璃基板上沉積鋁氧化鋅薄膜（aluminum-doped zinc oxide, AZO），探討此兩種不同製備法沉積之AZO薄膜特性，並分析這兩種不同製程製備之AZO薄膜的特性差異，包括表面形貌，成分，電性與穿透率分析。這二種製備法沉積的薄膜，其區域成份均有所差異。在後續的氬/氫混合氣體熱處理下，這二種薄膜的相關特性，變化不盡相同。在熱處理溫度達到600 ℃時，以溶膠-凝膠法製備之AZO薄膜，其變化較大，表面呈現遍佈許多孔隙與裂縫，且薄膜中的鋅原子含量遽減。相較起來以噴霧法製備之AZO薄膜有較完好穩定性。 In this thesis, we deposit the aluminum doped zinc oxide (AZO) thin film on glass substrates by sol–gel spin coating method and spray pyrolysis method. The surface morphologies, compositions, electrical and optical transmittance of the films were studied. The different composition variance of the films by the two methods can be found. With followed heat treatment under mixed argon/ hydrogen ambient, the film quality shows some different behaviors. As the temperature reach to 600℃, the AZO films prepared by sol-gel method were suffuse many cavities and less zinc quantity can be observed. On the contrary, the film prepared by spray pyrolysis method shows a better behavior at high temperature.

以化學沉積法製備掺鋁氧化鋅薄膜之研究 = Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition
徐, 鈺婷

以化學沉積法製備掺鋁氧化鋅薄膜之研究 = Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition / 徐鈺婷撰 - [高雄市] : 撰者, 2009[民98]. - 100面 ; 圖、表 ; 30公分.
參考書目：面指導教授：藍文厚.
噴霧熱解法aluminum doped zinc oxide (AZO)

以化學沉積法製備掺鋁氧化鋅薄膜之研究 = Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition
LDR:02570nam0a2200277 450 001 220273
005 20170214090844.0
009 220273
010 0 $b 平裝
010 0 $b 精裝
100 $a 20170214y2009 k y0chiy09 ea
101 1 $a chi $d chi $d eng
102 $a tw
105 $a ak am 000yy
200 1 $a 以化學沉積法製備掺鋁氧化鋅薄膜之研究 $d Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition $z eng $f 徐鈺婷撰
210 $a [高雄市] $c 撰者 $d 2009[民98]
215 0 $a 100面 $c 圖、表 $d 30公分
300 $a 參考書目：面
300 $a 指導教授：藍文厚
328 $a 碩士論文--國立高雄大學電機工程學系碩士班
330 $a 本論文以溶膠-凝膠法及噴霧熱解法在玻璃基板上沉積鋁氧化鋅薄膜（aluminum-doped zinc oxide, AZO），探討此兩種不同製備法沉積之AZO薄膜特性，並分析這兩種不同製程製備之AZO薄膜的特性差異，包括表面形貌，成分，電性與穿透率分析。這二種製備法沉積的薄膜，其區域成份均有所差異。在後續的氬/氫混合氣體熱處理下，這二種薄膜的相關特性，變化不盡相同。在熱處理溫度達到600 ℃時，以溶膠-凝膠法製備之AZO薄膜，其變化較大，表面呈現遍佈許多孔隙與裂縫，且薄膜中的鋅原子含量遽減。相較起來以噴霧法製備之AZO薄膜有較完好穩定性。 In this thesis, we deposit the aluminum doped zinc oxide (AZO) thin film on glass substrates by sol–gel spin coating method and spray pyrolysis method. The surface morphologies, compositions, electrical and optical transmittance of the films were studied. The different composition variance of the films by the two methods can be found. With followed heat treatment under mixed argon/ hydrogen ambient, the film quality shows some different behaviors. As the temperature reach to 600℃, the AZO films prepared by sol-gel method were suffuse many cavities and less zinc quantity can be observed. On the contrary, the film prepared by spray pyrolysis method shows a better behavior at high temperature.
510 1 $a Investigation of Aluminum Doped Znic Oxide Films by Chemical Deposition $z eng
610 0 $a 噴霧熱解法 $a 掺鋁氧化鋅 $a 溶膠-凝膠 $a 穿透率 $a 表面形貌
610 1 $a aluminum doped zinc oxide (AZO) $a sol-gel $a spray pyrolysis $a surface morphology $a transmittance
681 $a 008M/0019 $b 542201 2884 $v 2007年版
700 1 $a 徐 $b 鈺婷 $4 撰 $3 353947
712 0 2 $a 國立高雄大學 $b 電機工程學系碩士班 $3 166118
801 0 $a tw $b 國立高雄大學 $c 20091020 $g CCR
856 7 $2 http $u http://handle.ncl.edu.tw/11296/ndltd/45751184767712646776