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Multi-wafer rotating MEMS machinesturbines, generators, and engines /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Multi-wafer rotating MEMS machinesedited by Jeffrey H. Lang.
Reminder of title:	turbines, generators, and engines /
other author:	Lang, Jeffrey H.
Published:	Boston, MA :Springer-Verlag US,2009.
Description:	xiii, 456 p. :ill., digital ;25 cm.
Series:	MEMS reference shelf,
Contained By:	Springer eBooks
Subject:	Energy Technology.
Online resource:	http://dx.doi.org/10.1007/978-0-387-77747-4
ISBN:	9780387777474 (electronic bk.)

Multi-wafer rotating MEMS machinesturbines, generators, and engines /
Multi-wafer rotating MEMS machinesturbines, generators, and engines /[electronic resource] :edited by Jeffrey H. Lang. - Boston, MA :Springer-Verlag US,2009. - xiii, 456 p. :ill., digital ;25 cm. - MEMS reference shelf,1936-4407.

ISBN: 9780387777474 (electronic bk.)Subjects--Topical Terms:

338873
Energy Technology.

LC Class. No.: TK7875 / .M858 2009

Dewey Class. No.: 621.381

Multi-wafer rotating MEMS machinesturbines, generators, and engines /
LDR:00823nmm 2200241 a 4500 001 233711
003 Springer
005 20100113160744.0
006 m d
007 cr nn 008maaau
008 100223s2009 mau j eng d
020 $a 9780387777474 (electronic bk.)
020 $a 9780387777467 (paper)
035 $a 978-0-387-77746-7
050 0 4 $a TK7875 $b .M858 2009
082 0 4 $a 621.381 $2 22
090 $a TK7875 $b .M961 2009
245 0 0 $a Multi-wafer rotating MEMS machines $h [electronic resource] : $b turbines, generators, and engines / $c edited by Jeffrey H. Lang.
260 $a Boston, MA : $c 2009. $b Springer-Verlag US,
300 $a xiii, 456 p. : $b ill., digital ; $c 25 cm.
440 0 $a MEMS reference shelf, $x 1936-4407
650 2 4 $a Energy Technology. $3 338873
650 2 4 $a Electrical Engineering. $3 338706
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 1 4 $a Engineering. $3 210888
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Turbomachines. $3 190368
700 1 $a Lang, Jeffrey H. $3 376756
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-0-387-77747-4
950 $a Engineering (Springer-11647)

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000000036136

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EB TK7875 M961 2009

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http://dx.doi.org/10.1007/978-0-387-77747-4

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