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MEMSa practical guide to design, ana...

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Korvink, Jan G.

MEMSa practical guide to design, analysis, and applications /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	MEMSedited by Jan G. Korvink, Oliver Paul.
其他題名:	a practical guide to design, analysis, and applications /
其他作者:	Korvink, Jan G.
出版者:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2006.
面頁冊數:	xxv, 965 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
電子資源:	http://dx.doi.org/10.1007/978-3-540-33655-6
ISBN:	9783540336556 (electronic bk.)

MEMSa practical guide to design, analysis, and applications /
MEMSa practical guide to design, analysis, and applications /[electronic resource] :edited by Jan G. Korvink, Oliver Paul. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2006. - xxv, 965 p. :ill., digital ;24 cm.

ISBN: 9783540336556 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .M42 2006

Dewey Class. No.: 621

MEMSa practical guide to design, analysis, and applications /
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020 $a 9783540336556 (electronic bk.)
020 $a 9783540211174 (paper)
035 $a 978-3-540-21117-4
050 0 4 $a TK7875 $b .M42 2006
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245 0 0 $a MEMS $h [electronic resource] : $b a practical guide to design, analysis, and applications / $c edited by Jan G. Korvink, Oliver Paul.
260 $a Berlin, Heidelberg : $b Springer-Verlag Berlin Heidelberg, $c 2006.
300 $a xxv, 965 p. : $b ill., digital ; $c 24 cm.
650 0 $a Microelectromechanical systems. $3 189825
650 2 4 $a Optical and Electronic Materials. $3 274099
650 2 4 $a Nanotechnology. $3 193873
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 1 4 $a Engineering. $3 210888
650 2 4 $a Microwaves, RF and Optical Engineering. $3 274186
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700 1 $a Paul, Oliver. $3 264396
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856 4 0 $u http://dx.doi.org/10.1007/978-3-540-33655-6
950 $a Engineering (Springer-11647)

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