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Microsystem design
~
Senturia, Stephen D.
Microsystem design
Record Type:
Electronic resources : Monograph/item
Title/Author:
Microsystem designStephen D. Senturia.
Author:
Senturia, Stephen D.
Published:
Boston :Kluwer Academic Publishers,c2001.
Description:
xxvi, 689 p. :ill., digital ;24 cm.
Contained By:
Springer e-books
Subject:
Microelectromechanical systemsDesign and construction.
Online resource:
http://dx.doi.org/10.1007/b117574
ISBN:
9780306476013 (electronic bk.)
Microsystem design
Senturia, Stephen D.
Microsystem design
[electronic resource] /Stephen D. Senturia. - Boston :Kluwer Academic Publishers,c2001. - xxvi, 689 p. :ill., digital ;24 cm.
ISBN: 9780306476013 (electronic bk.)Subjects--Topical Terms:
206811
Microelectromechanical systems
--Design and construction.
LC Class. No.: TK7875 / .S46 2001
Dewey Class. No.: 621.381
Microsystem design
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Senturia, Stephen D.
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Microsystem design
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Stephen D. Senturia.
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Boston :
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Kluwer Academic Publishers,
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c2001.
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xxvi, 689 p. :
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ill., digital ;
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24 cm.
650
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Microelectromechanical systems
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Design and construction.
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206811
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System design.
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182170
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Microelectronics.
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http://dx.doi.org/10.1007/b117574
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Engineering
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000000046147
電子館藏
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EB TK7875 .S46 2001 c2001.
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1 records • Pages 1 •
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http://dx.doi.org/10.1007/b117574
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