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Introductory MEMSfabrication and app...

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Adams, Thomas M.

Introductory MEMSfabrication and applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Introductory MEMSby Thomas M. Adams, Richard A. Layton.
Reminder of title:	fabrication and applications /
Author:	Adams, Thomas M.
other author:	Layton, Richard A.
Published:	Boston, MA :Springer Science+Business Media, LLC,2010.
Description:	xv, 444 p. :ill. (some col.), digital ;25 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems.
Online resource:	http://dx.doi.org/10.1007/978-0-387-09511-0
ISBN:	9780387095110 (electronic bk.)

Introductory MEMSfabrication and applications /
Adams, Thomas M.

Introductory MEMSfabrication and applications /[electronic resource] :by Thomas M. Adams, Richard A. Layton. - Boston, MA :Springer Science+Business Media, LLC,2010. - xv, 444 p. :ill. (some col.), digital ;25 cm.

ISBN: 9780387095110 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .A33 2010

Dewey Class. No.: 621.381

Introductory MEMSfabrication and applications /
LDR:00773nmm 2200229 a 4500 001 274292
003 Springer
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006 m d
007 cr nn 008maaau
008 101221s2010 mau s j eng d
020 $a 9780387095110 (electronic bk.)
020 $a 9780387095103 (paper)
035 $a 978-0-387-09510-3
050 0 4 $a TK7875 $b .A33 2010
082 0 4 $a 621.381 $2 22
090 $a TK7875 $b .A218 2010
100 1 $a Adams, Thomas M. $3 233402
245 1 0 $a Introductory MEMS $h [electronic resource] : $b fabrication and applications / $c by Thomas M. Adams, Richard A. Layton.
260 $a Boston, MA : $b Springer Science+Business Media, LLC, $c 2010.
300 $a xv, 444 p. : $b ill. (some col.), digital ; $c 25 cm.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Electronic apparatus and appliances. $3 182369
650 0 $a Transducers. $3 197809
650 1 4 $a Engineering. $3 210888
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Mechanics. $3 200022
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 274441
650 2 4 $a Continuum Mechanics and Mechanics of Materials. $3 273691
700 1 $a Layton, Richard A. $3 485437
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-0-387-09511-0
950 $a Engineering (Springer-11647)

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EB TK7875 .A33 2010

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http://dx.doi.org/10.1007/978-0-387-09511-0

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