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Rare-earth implanted MOS devices for...

Rebohle, Lars.

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Rare-earth implanted MOS devices for silicon photonicsby Lars Rebohle, Wolfgang Skorupa.
Reminder of title:	microstructural, electrical and optoelectronic properties /
Author:	Rebohle, Lars.
other author:	Skorupa, Wolfgang.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2010.
Description:	xviii, 173 p. :ill., digital ;24 cm.
Series:	Springer series in materials science,
Contained By:	Springer eBooks
Subject:	Metal oxide semiconductors.
Online resource:	http://dx.doi.org/10.1007/978-3-642-14447-9
ISBN:	9783642144479 (electronic bk.)

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /
Rebohle, Lars.

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /[electronic resource] :by Lars Rebohle, Wolfgang Skorupa. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2010. - xviii, 173 p. :ill., digital ;24 cm. - Springer series in materials science,1420933-033X ;.

ISBN: 9783642144479 (electronic bk.)Subjects--Topical Terms:

212940
Metal oxide semiconductors.

LC Class. No.: TK7871.99.M44 / R37 2010

Dewey Class. No.: 621.39732

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /
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245 1 0 $a Rare-earth implanted MOS devices for silicon photonics $h [electronic resource] : $b microstructural, electrical and optoelectronic properties / $c by Lars Rebohle, Wolfgang Skorupa.
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