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麥克森干涉技術於微型結構薄膜之3D量測 = The measuremen...

吳俊輝

麥克森干涉技術於微型結構薄膜之3D量測 = The measurement for 3D mircostructure of thin film by using Michelson Interference method

Record Type:	Language materials, printed : monographic
Paralel Title:	The measurement for 3D mircostructure of thin film by using Michelson Interference method
Author:	吳俊輝,
Secondary Intellectual Responsibility:	國立高雄大學
Place of Publication:	[高雄市]
Published:	撰者;
Year of Publication:	民100[2011]
Description:	60面圖，表 : 30公分;
Subject:	麥克森干涉
Subject:	Michelson Interference
Online resource:	http://handle.ncl.edu.tw/11296/ndltd/53413235410428795267
Summary:	基於現今光電產業盛行，光學薄膜大量使用，相對於製作高品質的光學薄膜，薄膜表面的檢測也至關重要，一般機械式二維的表面檢測系統，需要相當的掃描時間，不容易應用於即時元件檢測。麥克森干涉表面檢測光學系統，是先取得受測物表面干涉條紋變化，再利用干涉條紋的數值轉換得到實際的待測物表面分佈。本文即探討利用麥克森干涉光學顯微系統及數位影像擷取之影像處理，利用干涉圖形的解調技術發展之MATLAB干涉圖形轉換程式，得到薄膜表面的實際形貌結構。 As electro-optical devices become dominated, the optical thin-films are important elements in the fabrication of electro-optical industry. Except for the needs of high quality's optical thin-films, surface's examination of thin film structure is also very important. Because that the mechanical surface profiling of a thin-film requires the expense of measuring time, it is important to develop non-intrusion techniques for thin-film profiling. An optical surface profiling method of applying Michelson interfering image contain information of surface structure which can be easily interrogated by using a numerical calculating program. In this thesis we demonstrates the development of a microscopic Michelson interferes surface profiling system which is able to achieve a high resolution depth profiling of a two dimensional thin film. The characterization of the performance of this surface profiling system effected by imaging approach has presented.

麥克森干涉技術於微型結構薄膜之3D量測 = The measurement for 3D mircostructure of thin film by using Michelson Interference method
吳, 俊輝

麥克森干涉技術於微型結構薄膜之3D量測 = The measurement for 3D mircostructure of thin film by using Michelson Interference method / 吳俊輝撰 - [高雄市] : 撰者, 民100[2011]. - 60面 ; 圖，表 ; 30公分.
參考書目：面.
麥克森干涉Michelson Interference

麥克森干涉技術於微型結構薄膜之3D量測 = The measurement for 3D mircostructure of thin film by using Michelson Interference method
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328 $a 碩士論文--國立高雄大學電機工程學系--先進電子構裝技術產業研發碩士專班
330 $a 基於現今光電產業盛行，光學薄膜大量使用，相對於製作高品質的光學薄膜，薄膜表面的檢測也至關重要，一般機械式二維的表面檢測系統，需要相當的掃描時間，不容易應用於即時元件檢測。麥克森干涉表面檢測光學系統，是先取得受測物表面干涉條紋變化，再利用干涉條紋的數值轉換得到實際的待測物表面分佈。本文即探討利用麥克森干涉光學顯微系統及數位影像擷取之影像處理，利用干涉圖形的解調技術發展之MATLAB干涉圖形轉換程式，得到薄膜表面的實際形貌結構。 As electro-optical devices become dominated, the optical thin-films are important elements in the fabrication of electro-optical industry. Except for the needs of high quality's optical thin-films, surface's examination of thin film structure is also very important. Because that the mechanical surface profiling of a thin-film requires the expense of measuring time, it is important to develop non-intrusion techniques for thin-film profiling. An optical surface profiling method of applying Michelson interfering image contain information of surface structure which can be easily interrogated by using a numerical calculating program. In this thesis we demonstrates the development of a microscopic Michelson interferes surface profiling system which is able to achieve a high resolution depth profiling of a two dimensional thin film. The characterization of the performance of this surface profiling system effected by imaging approach has presented.
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