Design and manufacturing of active m...
Burisch, Arne.

 

  • Design and manufacturing of active microsystems
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Design and manufacturing of active microsystemsedited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach.
    other author: Buttgenbach, Stephanus.
    Published: Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011.
    Description: xii, 444 p. :ill., digital ;24 cm.
    Series: Microtechnology and MEMS,
    Contained By: Springer eBooks
    Subject: Microtechnology.
    Online resource: http://dx.doi.org/10.1007/978-3-642-12903-2
    ISBN: 9783642129032 (electronic bk.)
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