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MEMS materials and processes handbook

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Ghodssi, Reza.

MEMS materials and processes handbook

Record Type:	Electronic resources : Monograph/item
Title/Author:	MEMS materials and processes handbookedited by Reza Ghodssi, Pinyen Lin.
other author:	Ghodssi, Reza.
Published:	Boston, MA :Springer Science+Business Media, LLC,2011.
Description:	xxxv, 1187 p. :ill., digital ;24 cm.
Series:	MEMS reference shelf,
Contained By:	Springer eBooks
Subject:	Microelectromechanical systemsMaterials.
Online resource:	http://dx.doi.org/10.1007/978-0-387-47318-5
ISBN:	9780387473185 (electronic bk.)

MEMS materials and processes handbook
MEMS materials and processes handbook[electronic resource] /edited by Reza Ghodssi, Pinyen Lin. - Boston, MA :Springer Science+Business Media, LLC,2011. - xxxv, 1187 p. :ill., digital ;24 cm. - MEMS reference shelf,1936-4407.

ISBN: 9780387473185 (electronic bk.)Subjects--Topical Terms:

511661
Microelectromechanical systems
--Materials.

LC Class. No.: TK7875 / .M46 2011

Dewey Class. No.: 621.381

MEMS materials and processes handbook
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003 Springer
005 20110804170416.0
006 m d
007 cr nn 008maaau
008 110816s2011 mau s j eng d
020 $a 9780387473185 (electronic bk.)
020 $a 9780387473161 (paper)
035 $a 978-0-387-47316-1
050 0 4 $a TK7875 $b .M46 2011
082 0 4 $a 621.381 $2 22
090 $a TK7875 $b .M533 2011
245 0 0 $a MEMS materials and processes handbook $h [electronic resource] / $c edited by Reza Ghodssi, Pinyen Lin.
260 $a Boston, MA : $b Springer Science+Business Media, LLC, $c 2011.
300 $a xxxv, 1187 p. : $b ill., digital ; $c 24 cm.
440 0 $a MEMS reference shelf, $x 1936-4407
650 0 $a Microelectromechanical systems $x Materials. $3 511661
650 0 $a Microelectromechanical systems. $3 189825
650 1 4 $a Engineering. $3 210888
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Materials Science, general. $3 308687
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 274441
700 1 $a Ghodssi, Reza. $3 511659
700 1 $a Lin, Pinyen. $3 511660
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-0-387-47318-5
950 $a Engineering (Springer-11647)

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EB TK7875 .M46 2011

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http://dx.doi.org/10.1007/978-0-387-47318-5

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